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last 30 patents
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Patent Grant
Reaction chamber and plasma processing apparatus
Patent number
10,854,482
Issue date
Dec 1, 2020
BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., LTD.
Xingcun Li
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
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Patent Application
REACTION CHAMBER AND PLASMA PROCESSING APPARATUS
Publication number
20170011938
Publication date
Jan 12, 2017
Beijing NMC Co., Ltd.
Xingcun LI
H01 - BASIC ELECTRIC ELEMENTS