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Minjoon Kim
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Gwangmyeong-si, KR
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Patents Grants
last 30 patents
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Patent Grant
Vacuum chuck, substrate processing apparatus including the same and...
Patent number
11,476,151
Issue date
Oct 18, 2022
Samsung Electronics Co., Ltd.
Byounghoon Ji
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Gas supply and layer deposition apparatus including the same
Patent number
11,220,748
Issue date
Jan 11, 2022
Samsung Electronics Co., Ltd.
Donghoon Han
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
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Patent Application
VACUUM CHUCK, SUBSTRATE PROCESSING APPARATUS INCLUDING THE SAME AND...
Publication number
20210074574
Publication date
Mar 11, 2021
Samsung Electronics Co., Ltd.
Byounghoon Ji
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
GAS SUPPLY AND LAYER DEPOSITION APPARATUS INCLUDING THE SAME
Publication number
20210062339
Publication date
Mar 4, 2021
Samsung Electronics Co., Ltd.
Donghoon Han
H01 - BASIC ELECTRIC ELEMENTS