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Minjoon Park
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Yongin-si, KR
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Patents Grants
last 30 patents
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Patent Grant
Electrostatic chuck assembly and substrate processing apparatus inc...
Patent number
10,497,597
Issue date
Dec 3, 2019
Samsung Electronics Co., Ltd.
Jaehyun Lee
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Methods of forming semiconductor devices using hard masks
Patent number
9,305,802
Issue date
Apr 5, 2016
Samsung Electronics Co., Ltd.
Dongchan Kim
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of fabricating semiconductor devices
Patent number
9,123,657
Issue date
Sep 1, 2015
Samsung Electronics Co., Ltd.
Minjoon Park
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
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Patent Application
ELECTROSTATIC CHUCK ASSEMBLY AND SUBSTRATE PROCESSING APPARATUS INC...
Publication number
20180053674
Publication date
Feb 22, 2018
Samsung Electronics Co., Ltd.
Jaehyun LEE
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHODS OF FORMING SEMICONDUCTOR DEVICES USING HARD MASKS
Publication number
20150104947
Publication date
Apr 16, 2015
Samsung Electronics Co., Ltd.
Dongchan Kim
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF FABRICATING SEMICONDUCTOR DEVICES
Publication number
20150079791
Publication date
Mar 19, 2015
Samsung Electronics Co., Ltd.
Minjoon PARK
H01 - BASIC ELECTRIC ELEMENTS