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Minkyu KIM
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Wilton, CT, US
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last 30 patents
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Patent Grant
Positioning system and lithographic apparatus
Patent number
11,003,095
Issue date
May 11, 2021
ASML Netherlands B.V.
Krijn Frederik Bustraan
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
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Patent Application
POSITIONING SYSTEM AND LITHOGRAPHIC APPARATUS
Publication number
20190219932
Publication date
Jul 18, 2019
ASML NETHERLANDS B.V.
Krijn Frederik BUSTRAAN
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Patent Application
COIL ASSEMBLY, ELECTROMAGNETIC ACTUATOR, STAGE POSITIONING DEVICE,...
Publication number
20170010544
Publication date
Jan 12, 2017
ASML NETHERLANDS B.V.
Yang-Shan HUANG
H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER