MINKYU SUNG

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HWASEONG-SI, KR

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Patents Grantslast 30 patents

Information Patent Grant
Gas injection module, substrate processing apparatus, and method of...
- Patent number 11,384,433
- Issue date Jul 12, 2022
- Samsung Electronics Co., Ltd.
- Minkyu Sung
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Gas supply assembly and substrate processing apparatus including th...
- Patent number 11,251,022
- Issue date Feb 15, 2022
- Samsung Electronics Co., Ltd.
- Kangmin Jeon
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Gas injection module, substrate processing apparatus, and method of...
- Patent number 10,934,621
- Issue date Mar 2, 2021
- Samsung Electronics Co., Ltd.
- Minkyu Sung
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
GAS INJECTION MODULE, SUBSTRATE PROCESSING APPARATUS, AND METHOD OF...
- Publication number 20210147982
- Publication date May 20, 2021
- Samsung Electronics Co., Ltd.
- MINKYU SUNG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
GAS SUPPLY ASSEMBLY AND SUBSTRATE PROCESSING APPARATUS INCLUDING TH...
- Publication number 20210104381
- Publication date Apr 8, 2021
- Samsung Electronics Co., Ltd.
- Kangmin JEON
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
GAS INJECTION MODULE, SUBSTRATE PROCESSING APPARATUS, AND METHOD OF...
- Publication number 20200157682
- Publication date May 21, 2020
- Samsung Electronics Co., Ltd.
- MINKYU SUNG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...