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Patents Grants
last 30 patents
Information
Patent Grant
Substrate placement in immersion lithography
Patent number
10,345,711
Issue date
Jul 9, 2019
ASML Netherlands B.V.
Christiaan Alexander Hoogendam
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Substrate placement in immersion lithography
Patent number
9,740,106
Issue date
Aug 22, 2017
ASML Netherlands B.V.
Christiaan Alexander Hoogendam
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Substrate placement in immersion lithography
Patent number
9,182,222
Issue date
Nov 10, 2015
ASML Netherlands B.V.
Christiaan Alexander Hoogendam
G01 - MEASURING TESTING
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
8,749,754
Issue date
Jun 10, 2014
ASML Netherlands B.V.
Bob Streefkerk
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
8,553,201
Issue date
Oct 8, 2013
ASML Netherlands B.V.
Bob Streefkerk
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Substrate placement in immersion lithography
Patent number
8,441,617
Issue date
May 14, 2013
ASML Netherlands B.V.
Christiaan Alexander Hoogendam
G01 - MEASURING TESTING
Information
Patent Grant
Substrate placement in immersion lithography
Patent number
8,077,291
Issue date
Dec 13, 2011
ASML Netherlands B.V.
Christiaan Alexander Hoogendam
G01 - MEASURING TESTING
Information
Patent Grant
Radiometric Kirk test
Patent number
8,059,266
Issue date
Nov 15, 2011
ASML Holding N.V.
David A. Hult
G01 - MEASURING TESTING
Information
Patent Grant
Uniform background radiation in maskless lithography
Patent number
8,009,270
Issue date
Aug 30, 2011
ASML Netherlands B.V.
Paul Antoon Cyriel Desmedt
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Optimal rasterization for maskless lithography
Patent number
8,009,269
Issue date
Aug 30, 2011
ASML Holding N.V.
Kars Zeger Troost
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus, immersion projection apparatus and device m...
Patent number
7,859,644
Issue date
Dec 28, 2010
ASML Netherlands B.V.
Jan-Gerard Cornelis Van Der Toorn
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
7,671,963
Issue date
Mar 2, 2010
ASML Netherlands B.V.
Bob Streefkerk
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
7,486,381
Issue date
Feb 3, 2009
ASML Netherlands B.V.
Bob Streefkerk
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Substrate placement in immersion lithography
Patent number
7,352,440
Issue date
Apr 1, 2008
ASML Netherlands B.V.
Christiaan Alexander Hoogendam
G01 - MEASURING TESTING
Information
Patent Grant
Lithographic apparatus, immersion projection apparatus and device m...
Patent number
7,330,238
Issue date
Feb 12, 2008
ASML Netherlands, B.V.
Jan-Gerard Cornelis Van Der Toorn
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
SUBSTRATE PLACEMENT IN IMMERSION LITHOGRAPHY
Publication number
20180067401
Publication date
Mar 8, 2018
ASML NETHERLANDS B.V.
Christiaan Alexander Hoogendam
G01 - MEASURING TESTING
Information
Patent Application
LITHOGRAPHIC SYSTEM
Publication number
20170052456
Publication date
Feb 23, 2017
ASML NETHERLANDS B.V.
Jan Bernard Plechelmus VAN SCHOOT
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
SUBSTRATE PLACEMENT IN IMMERSION LITHOGRAPHY
Publication number
20160054665
Publication date
Feb 25, 2016
ASML NETHERLANDS B.V.
Christiaan Alexander Hoogendam
G01 - MEASURING TESTING
Information
Patent Application
SUBSTRATE PLACEMENT IN IMMERSION LITHOGRAPHY
Publication number
20130182231
Publication date
Jul 18, 2013
ASML NETHERLANDS B.V.
Christiaan Alexander Hoogendam
G01 - MEASURING TESTING
Information
Patent Application
SUBSTRATE PLACEMENT IN IMMERSION LITHOGRAPHY
Publication number
20120050740
Publication date
Mar 1, 2012
ASML NETHERLANDS B.V.
CHRISTIAAN ALEXANDER HOOGENDAM
G01 - MEASURING TESTING
Information
Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
Publication number
20100091255
Publication date
Apr 15, 2010
ASML NETHERLANDS B.V.
Bob STREEFKERK
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Radiometric Kirk Test
Publication number
20090086179
Publication date
Apr 2, 2009
ASML Holding N.V.
David A. Hult
G01 - MEASURING TESTING
Information
Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
Publication number
20090033905
Publication date
Feb 5, 2009
ASML NETHERLANDS B.V.
Bob STREEFKERK
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
DOSE CONTROL FOR OPTICAL MASKLESS LITHOGRAPHY
Publication number
20080304034
Publication date
Dec 11, 2008
ASML NETHERLANDS B.V.
David Christopher Ockwell
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
UNIFORM BACKGROUND RADIATION IN MASKLESS LITHOGRAPHY
Publication number
20080231826
Publication date
Sep 25, 2008
ASML NETHERLANDS B.V.
Paul Antoon Cyriel Desmedt
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Optimal Rasterization for Maskless Lithography
Publication number
20080224251
Publication date
Sep 18, 2008
ASML Holding N.V.
Kars Zeger Troost
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic apparatus, immersion projection apparatus and device m...
Publication number
20080123071
Publication date
May 29, 2008
ASML NETHERLANDS B.V.
Jan-Gerard Cornelis Van Der Toorn
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Substrate placement in immersion lithography
Publication number
20080106723
Publication date
May 8, 2008
ASML NETHERLANDS B.V.
Christiaan Alexander Hoogendam
G01 - MEASURING TESTING
Information
Patent Application
Lithographic apparatus, immersion projection apparatus and device m...
Publication number
20060215131
Publication date
Sep 28, 2006
ASML NETHERLANDS B.V.
Jan-Gerard Cornelis Van Der Toorn
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Substrate placement in immersion lithography
Publication number
20060126038
Publication date
Jun 15, 2006
ASML NETHERLANDS B.V.
Christiaan Alexander Hoogendam
G01 - MEASURING TESTING
Information
Patent Application
Lithographic apparatus and device manufacturing method
Publication number
20050270506
Publication date
Dec 8, 2005
ASML NETHERLANDS B.V.
Bob Streefkerk
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic apparatus and device manufacturing method
Publication number
20050259233
Publication date
Nov 24, 2005
ASML NETHERLANDS B.V.
Bob Streefkerk
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY