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Minoru Akiyama
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Hyogo, JP
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last 30 patents
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Patent Grant
Fine-particle measuring apparatus
Patent number
5,030,842
Issue date
Jul 9, 1991
Mitsubishi Denki Kabushiki Kaisha
Masao Koshinaka
G01 - MEASURING TESTING
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Patent Grant
System for detecting minute particles on or above a substrate
Patent number
5,008,558
Issue date
Apr 16, 1991
Mitsubishi Denki Kabushiki Kaisha
Masao Koshinaka
G01 - MEASURING TESTING