Minoru Fube

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Hayami-gun, JP

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Patents Grantslast 30 patents

Information Patent Grant
Method for removing particles on semiconductor wafers
- Patent number 6,973,934
- Issue date Dec 13, 2005
- Texas Instruments Incorporated
- Toshihito Tsuga
- B08 - CLEANING
Information Patent Grant
Method and device for removing particles on semiconductor wafers
- Patent number 6,946,036
- Issue date Sep 20, 2005
- Texas Instruments Incorporated
- Toshihito Tsuga
- B08 - CLEANING

Patents Applicationslast 30 patents

Information Patent Application
Method and device for removing particles on semiconductor wafers
- Publication number 20030041876
- Publication date Mar 6, 2003
- Toshihito Tsuga
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method and device for removing particles on semiconductor wafers
- Publication number 20030000548
- Publication date Jan 2, 2003
- Toshihito Tsuga
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method for removing particles on semiconductor wafers
- Publication number 20020166571
- Publication date Nov 14, 2002
- Toshihito Tsuga
- B08 - CLEANING