Minoru Hanazaki

Person

Amagasaki, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Manufacturing method of semiconductor integrated circuit device
- Patent number 7,790,478
- Issue date Sep 7, 2010
- Renesas Technology Corp.
- Kazuyuki Fujii
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma processing apparatus capable of evaluating process performance
- Patent number 6,929,712
- Issue date Aug 16, 2005
- Renesas Technology Corp.
- Minoru Hanazaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Gas analyzing method and gas analyzer for semiconductor treater
- Patent number 6,864,982
- Issue date Mar 8, 2005
- Renesas Technology Corp.
- Minoru Hanazaki
- G01 - MEASURING TESTING
Information Patent Grant
Wafer processing apparatus
- Patent number 6,416,618
- Issue date Jul 9, 2002
- Mitsubishi Denki Kabushiki Kaisha
- Masaaki Tsuchihashi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma processing method and plasma processing apparatus
- Patent number 6,287,980
- Issue date Sep 11, 2001
- Mitsubishi Denki Kabushiki Kaisha
- Minoru Hanazaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing apparatus capable of reliably, electrostatically...
- Patent number 6,273,023
- Issue date Aug 14, 2001
- Mitsubishi Denki Kabushiki Kaisha
- Masaaki Tsuchihashi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Etching apparatus, etching method, manufacturing method of a semico...
- Patent number 6,218,196
- Issue date Apr 17, 2001
- Mitsubishi Denki Kabushiki Kaisha
- Hirotoshi Ise
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma generating apparatus with multiple microwave introducing means
- Patent number 6,109,208
- Issue date Aug 29, 2000
- Mitsubishi Denki Kabushiki Kaisha
- Masaaki Tsuchihashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Magnetically enhanced microwave plasma generating apparatus
- Patent number 6,054,016
- Issue date Apr 25, 2000
- Mitsubishi Denki Kabushiki Kaisha
- Mutumi Tuda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor manufacturing device and method of removing particles...
- Patent number 6,024,105
- Issue date Feb 15, 2000
- Mitsubishi Denki Kabushiki Kaisha
- Minoru Hanazaki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma processor
- Patent number 4,947,085
- Issue date Aug 7, 1990
- Mitsubishi Denki Kabushiki Kaisha
- Koichiro Nakanishi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for uniformly distributing plasma over a substrate
- Patent number 4,894,510
- Issue date Jan 16, 1990
- Mitsubishi Denki Kabushiki Kaisha
- Koichiro Nakanishi
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
MANUFACTURING METHOD OF SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE
- Publication number 20090035945
- Publication date Feb 5, 2009
- RENESAS TECHNOLOGY CORP.
- Kazuyuki FUJII
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Semiconductor processing apparatus having semiconductor wafer mounting
- Publication number 20040182311
- Publication date Sep 23, 2004
- RENESAS TECHNOLOGY CORP.
- Minoru Hanazaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Plasma processing apparatus capable of evaluating process performance
- Publication number 20030178140
- Publication date Sep 25, 2003
- Mitsubishi Denki Kabushiki Kaisha
- Minoru Hanazaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Semiconductor processing apparatus and manufacturing method of semi...
- Publication number 20030056899
- Publication date Mar 27, 2003
- Mitsubishi Denki Kabushiki Kaisha
- Minoru Hanazaki
- G01 - MEASURING TESTING
Information Patent Application
Gas analyzing method and gas analyzer for semiconductor treater
- Publication number 20030046976
- Publication date Mar 13, 2003
- Mitsubishi Denki Kabushiki Kaisha
- Minoru Hanazaki
- G01 - MEASURING TESTING
Information Patent Application
WAFER PROCESSING APPARATUS
- Publication number 20020002950
- Publication date Jan 10, 2002
- MASAAKI TSUCHIHASHI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Minoru Hanazaki

Person

Patents Grantslast 30 patents

Manufacturing method of semiconductor integrated circuit device

Plasma processing apparatus capable of evaluating process performance

Gas analyzing method and gas analyzer for semiconductor treater

Wafer processing apparatus

Plasma processing method and plasma processing apparatus

Plasma processing apparatus capable of reliably, electrostatically...

Etching apparatus, etching method, manufacturing method of a semico...

Plasma generating apparatus with multiple microwave introducing means

Magnetically enhanced microwave plasma generating apparatus

Semiconductor manufacturing device and method of removing particles...

Plasma processor

Apparatus for uniformly distributing plasma over a substrate

Patents Applicationslast 30 patents

MANUFACTURING METHOD OF SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE

Semiconductor processing apparatus having semiconductor wafer mounting

Plasma processing apparatus capable of evaluating process performance

Semiconductor processing apparatus and manufacturing method of semi...

Gas analyzing method and gas analyzer for semiconductor treater

WAFER PROCESSING APPARATUS