Minoru Harada

Person

Tokyo, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Defect inspecting system and defect inspecting method
- Patent number 12,154,264
- Issue date Nov 26, 2024
- HITACHI HIGH-TECH CORPORATION
- Minoru Harada
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Wafer observation apparatus and wafer observation method
- Patent number 11,670,528
- Issue date Jun 6, 2023
- HITACHI HIGH-TECH CORPORATION
- Naoaki Kondo
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Defect observation device
- Patent number 11,177,111
- Issue date Nov 16, 2021
- HITACHI HIGH-TECH CORPORATION
- Akira Ito
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Sample observation device and sample observation method
- Patent number 11,170,483
- Issue date Nov 9, 2021
- HITACHI HIGH-TECH CORPORATION
- Minoru Harada
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Defect observation device and defect observation method
- Patent number 11,087,454
- Issue date Aug 10, 2021
- HITACHI HIGH-TECH CORPORATION
- Naoaki Kondo
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Wafer observation device
- Patent number 10,977,786
- Issue date Apr 13, 2021
- HITACHI HIGH-TECH CORPORATION
- Naoaki Kondo
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Defect observation system and defect observation method for semicon...
- Patent number 10,971,325
- Issue date Apr 6, 2021
- HITACHI HIGH-TECH CORPORATION
- Minoru Harada
- G01 - MEASURING TESTING
Information Patent Grant
Defect classification apparatus and defect classification method
- Patent number 10,810,733
- Issue date Oct 20, 2020
- HITACHI HIGH-TECH CORPORATION
- Naoaki Kondo
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method for measuring overlay and measuring apparatus, scanning elec...
- Patent number 10,783,625
- Issue date Sep 22, 2020
- HITACHI HIGH-TECH CORPORATION
- Minoru Harada
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Sample observation device and sample observation method
- Patent number 10,559,074
- Issue date Feb 11, 2020
- Hitachi High-Technologies Corporation
- Minoru Harada
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Sample observation method and sample observation device
- Patent number 10,229,812
- Issue date Mar 12, 2019
- Hitachi High-Technologies Corporation
- Minoru Harada
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Defect classification apparatus and defect classification method
- Patent number 10,203,851
- Issue date Feb 12, 2019
- Hitachi High-Technologies Corporation
- Yohei Minekawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Defect inspection method and defect inspection device
- Patent number 9,922,414
- Issue date Mar 20, 2018
- Hitachi High-Technologies Corporation
- Yuji Takagi
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Defect observation method and defect observation device
- Patent number 9,811,897
- Issue date Nov 7, 2017
- Hitachi High-Technologies Corporation
- Minoru Harada
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method for measuring overlay and measuring apparatus, scanning elec...
- Patent number 9,799,112
- Issue date Oct 24, 2017
- Hitachi High-Technologies Corporation
- Minoru Harada
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Defect observation method and defect observation device
- Patent number 9,569,836
- Issue date Feb 14, 2017
- Hitachi High-Technologies Corporation
- Takehiro Hirai
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Defect classification method, and defect classification system
- Patent number 9,401,015
- Issue date Jul 26, 2016
- Hitachi High-Technologies Corporation
- Yohei Minekawa
- G01 - MEASURING TESTING
Information Patent Grant
Method and device for testing defect using SEM
- Patent number 9,390,490
- Issue date Jul 12, 2016
- Hitachi High-Technologies Corporation
- Yuji Takagi
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method and apparatus for reviewing defect
- Patent number 9,342,879
- Issue date May 17, 2016
- Hitachi Hich-Technologies Corporation
- Yohei Minekawa
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Inspection method and device therefor
- Patent number 9,311,697
- Issue date Apr 12, 2016
- Hitachi High-Technologies Corporation
- Minoru Harada
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Defect inspection method and defect inspection device
- Patent number 9,165,356
- Issue date Oct 20, 2015
- Hitachi High-Technologies Corporation
- Minoru Harada
- G01 - MEASURING TESTING
Information Patent Grant
Method and apparatus for reviewing defects
- Patent number 8,731,275
- Issue date May 20, 2014
- Hitachi High-Technologies Corporation
- Minoru Harada
- G01 - MEASURING TESTING
Information Patent Grant
Reviewed defect selection processing method, defect review method,...
- Patent number 8,675,949
- Issue date Mar 18, 2014
- Hitachi High-Technologies Corporation
- Yuji Takagi
- G01 - MEASURING TESTING
Information Patent Grant
Defect observation method and defect observation apparatus
- Patent number 8,634,634
- Issue date Jan 21, 2014
- Hitachi High-Technologies Corporation
- Minoru Harada
- G01 - MEASURING TESTING
Information Patent Grant
Defect review method and apparatus
- Patent number 8,526,710
- Issue date Sep 3, 2013
- Hitachi High-Technologies Corporation
- Ryo Nakagaki
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method and apparatus for reviewing defects
- Patent number 8,355,559
- Issue date Jan 15, 2013
- Hitachi High-Technologies Corporation
- Minoru Harada
- G01 - MEASURING TESTING
Information Patent Grant
Method and its apparatus for reviewing defects
- Patent number 8,121,397
- Issue date Feb 21, 2012
- Hitachi High-Technologies Corporation
- Minoru Harada
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method and system for observing a specimen using a scanning electro...
- Patent number 7,932,493
- Issue date Apr 26, 2011
- Hitachi High-Technologies Corporation
- Minoru Harada
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
DEFECT INSPECTING SYSTEM AND DEFECT INSPECTING METHOD
- Publication number 20230052350
- Publication date Feb 16, 2023
- HITACHI HIGH-TECH CORPORATION
- Minoru HARADA
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
SAMPLE OBSERVATION SYSTEM AND IMAGE PROCESSING METHOD
- Publication number 20230005123
- Publication date Jan 5, 2023
- HITACHI HIGH-TECH CORPORATION
- Naoaki KONDO
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
SAMPLE OBSERVATION DEVICE AND METHOD
- Publication number 20220405905
- Publication date Dec 22, 2022
- HITACHI HIGH-TECH CORPORATION
- Yuki Doi
- G01 - MEASURING TESTING
Information Patent Application
WAFER OBSERVATION APPARATUS AND WAFER OBSERVATION METHOD
- Publication number 20200411345
- Publication date Dec 31, 2020
- HITACHI HIGH-TECH CORPORATION
- Naoaki Kondo
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
DEFECT OBSERVATION DEVICE
- Publication number 20200335300
- Publication date Oct 22, 2020
- HITACHI HIGH-TECH CORPORATION
- Akira ITO
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
SAMPLE OBSERVATION DEVICE AND SAMPLE OBSERVATION METHOD
- Publication number 20200126201
- Publication date Apr 23, 2020
- Hitachi High-Technologies Corporation
- Minoru HARADA
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
DEFECT OBSERVATION SYSTEM AND DEFECT OBSERVATION METHOD FOR SEMICON...
- Publication number 20200083017
- Publication date Mar 12, 2020
- Hitachi High-Technologies Corporation
- Minoru HARADA
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
DEFECT OBSERVATION DEVICE AND DEFECT OBSERVATION METHOD
- Publication number 20200034957
- Publication date Jan 30, 2020
- Hitachi High-Technologies Corporation
- Naoaki KONDO
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
WAFER OBSERVATION DEVICE
- Publication number 20190266713
- Publication date Aug 29, 2019
- Hitachi High-Technologies Corporation
- Naoaki KONDO
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
DEFECT CLASSIFICATION APPARATUS AND DEFECT CLASSIFICATION METHOD
- Publication number 20190139210
- Publication date May 9, 2019
- Hitachi High-Technologies Corporation
- Naoaki KONDO
- G01 - MEASURING TESTING
Information Patent Application
SAMPLE OBSERVATION DEVICE AND SAMPLE OBSERVATION METHOD
- Publication number 20180240225
- Publication date Aug 23, 2018
- Hitachi High-Technologies Corporation
- Minoru HARADA
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
DEFECT IMAGE CLASSIFICATION DEVICE AND DEFECT IMAGE CLASSIFICATION...
- Publication number 20180174000
- Publication date Jun 21, 2018
- Hitachi High-Technologies Corporation
- Yuji TAKAGI
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
METHOD FOR MEASURING OVERLAY AND MEASURING APPARATUS, SCANNING ELEC...
- Publication number 20180025482
- Publication date Jan 25, 2018
- Hitachi High-Technologies Corporation
- Minoru HARADA
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
SAMPLE OBSERVATION METHOD AND SAMPLE OBSERVATION DEVICE
- Publication number 20180019097
- Publication date Jan 18, 2018
- Hitachi High-Technologies Corporation
- Minoru HARADA
- G01 - MEASURING TESTING
Information Patent Application
DEFECT INSPECTION METHOD AND DEFECT INSPECTION DEVICE
- Publication number 20160019682
- Publication date Jan 21, 2016
- Hitachi High-Technologies Corporation
- Yuji TAKAGI
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
DEFECT OBSERVATION METHOD AND DEFECT OBSERVATION DEVICE
- Publication number 20150332445
- Publication date Nov 19, 2015
- Hitachi High-Technologies Corporation
- Minoru HARADA
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Defect Observation Method and Defect Observation Device
- Publication number 20150302568
- Publication date Oct 22, 2015
- Hitachi High-Technologies Corporation
- Takehiro HIRAI
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
METHOD FOR MEASURING OVERLAY AND MEASURING APPARATUS, SCANNING ELEC...
- Publication number 20140375793
- Publication date Dec 25, 2014
- Minoru Harada
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
GUI, CLASSIFICATION APPARATUS, CLASSIFICATION METHOD, PROGRAM, AND...
- Publication number 20140331173
- Publication date Nov 6, 2014
- Yohei Minekawa
- G02 - OPTICS
Information Patent Application
Method and Apparatus for Reviewing Defect
- Publication number 20140219546
- Publication date Aug 7, 2014
- Hitachi High-Technologies Corporation
- Yohei Minekawa
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Defect Inspection Method and Defect Inspection Device
- Publication number 20140169657
- Publication date Jun 19, 2014
- Hitachi High-Technologies Corporation
- Minoru Harada
- G01 - MEASURING TESTING
Information Patent Application
DEFECT CLASSIFICATION METHOD, AND DEFECT CLASSIFICATION SYSTEM
- Publication number 20140072204
- Publication date Mar 13, 2014
- Hitachi High-Technologies Corporation
- Yohei Minekawa
- G01 - MEASURING TESTING
Information Patent Application
DEFECT REVIEW METHOD AND APPARATUS
- Publication number 20140037188
- Publication date Feb 6, 2014
- Hitachi High-Technologies Corporation
- Ryo Nakagaki
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
IMAGE CLASSIFICATION METHOD AND IMAGE CLASSIFICATION APPARATUS
- Publication number 20130294680
- Publication date Nov 7, 2013
- Hitachi High-Technologies Corporation
- Minoru Harada
- G01 - MEASURING TESTING
Information Patent Application
DEFECT CLASSIFICATION SYSTEM AND DEFECT CLASSIFICATION DEVICE AND I...
- Publication number 20130222574
- Publication date Aug 29, 2013
- Ryo Nakagaki
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
METHOD AND APPARATUS FOR REVIEWING DEFECTS
- Publication number 20130114881
- Publication date May 9, 2013
- Minoru Harada
- G01 - MEASURING TESTING
Information Patent Application
INSPECTION METHOD AND DEVICE THEREFOR
- Publication number 20130108147
- Publication date May 2, 2013
- Minoru Harada
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
METHOD AND DEVICE FOR TESTING DEFECT USING SEM
- Publication number 20130070078
- Publication date Mar 21, 2013
- Yuji Takagi
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
METHOD FOR DEFECT INSPECTION AND APPARATUS FOR DEFECT INSPECTION
- Publication number 20120257041
- Publication date Oct 11, 2012
- Ryo Nakagaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
REVIEWED DEFECT SELECTION PROCESSING METHOD, DEFECT REVIEW METHOD,...
- Publication number 20120093392
- Publication date Apr 19, 2012
- Yuji Takagi
- G01 - MEASURING TESTING

Minoru Harada

Person

Patents Grantslast 30 patents

Defect inspecting system and defect inspecting method

Wafer observation apparatus and wafer observation method

Defect observation device

Sample observation device and sample observation method

Defect observation device and defect observation method

Wafer observation device

Defect observation system and defect observation method for semicon...

Defect classification apparatus and defect classification method

Method for measuring overlay and measuring apparatus, scanning elec...

Sample observation device and sample observation method

Sample observation method and sample observation device

Defect classification apparatus and defect classification method

Defect inspection method and defect inspection device

Defect observation method and defect observation device

Method for measuring overlay and measuring apparatus, scanning elec...

Defect observation method and defect observation device

Defect classification method, and defect classification system

Method and device for testing defect using SEM

Method and apparatus for reviewing defect

Inspection method and device therefor

Defect inspection method and defect inspection device

Method and apparatus for reviewing defects

Reviewed defect selection processing method, defect review method,...

Defect observation method and defect observation apparatus

Defect review method and apparatus

Method and apparatus for reviewing defects

Method and its apparatus for reviewing defects

Method and system for observing a specimen using a scanning electro...

Patents Applicationslast 30 patents

DEFECT INSPECTING SYSTEM AND DEFECT INSPECTING METHOD

SAMPLE OBSERVATION SYSTEM AND IMAGE PROCESSING METHOD

SAMPLE OBSERVATION DEVICE AND METHOD

WAFER OBSERVATION APPARATUS AND WAFER OBSERVATION METHOD

DEFECT OBSERVATION DEVICE

SAMPLE OBSERVATION DEVICE AND SAMPLE OBSERVATION METHOD

DEFECT OBSERVATION SYSTEM AND DEFECT OBSERVATION METHOD FOR SEMICON...

DEFECT OBSERVATION DEVICE AND DEFECT OBSERVATION METHOD

WAFER OBSERVATION DEVICE

DEFECT CLASSIFICATION APPARATUS AND DEFECT CLASSIFICATION METHOD

SAMPLE OBSERVATION DEVICE AND SAMPLE OBSERVATION METHOD

DEFECT IMAGE CLASSIFICATION DEVICE AND DEFECT IMAGE CLASSIFICATION...

METHOD FOR MEASURING OVERLAY AND MEASURING APPARATUS, SCANNING ELEC...

SAMPLE OBSERVATION METHOD AND SAMPLE OBSERVATION DEVICE

DEFECT INSPECTION METHOD AND DEFECT INSPECTION DEVICE

DEFECT OBSERVATION METHOD AND DEFECT OBSERVATION DEVICE

Defect Observation Method and Defect Observation Device

METHOD FOR MEASURING OVERLAY AND MEASURING APPARATUS, SCANNING ELEC...

GUI, CLASSIFICATION APPARATUS, CLASSIFICATION METHOD, PROGRAM, AND...

Method and Apparatus for Reviewing Defect

Defect Inspection Method and Defect Inspection Device

DEFECT CLASSIFICATION METHOD, AND DEFECT CLASSIFICATION SYSTEM

DEFECT REVIEW METHOD AND APPARATUS

IMAGE CLASSIFICATION METHOD AND IMAGE CLASSIFICATION APPARATUS

DEFECT CLASSIFICATION SYSTEM AND DEFECT CLASSIFICATION DEVICE AND I...

METHOD AND APPARATUS FOR REVIEWING DEFECTS

INSPECTION METHOD AND DEVICE THEREFOR

METHOD AND DEVICE FOR TESTING DEFECT USING SEM

METHOD FOR DEFECT INSPECTION AND APPARATUS FOR DEFECT INSPECTION

REVIEWED DEFECT SELECTION PROCESSING METHOD, DEFECT REVIEW METHOD,...