Minoru Ito

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Sagamihara-shi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Apparatus for inspecting mask
- Patent number 6,686,591
- Issue date Feb 3, 2004
- Holon Co., LTD
- Minoru Ito
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
Apparatus for inspecting mask
- Publication number 20030151002
- Publication date Aug 14, 2003
- Minoru Ito
- G01 - MEASURING TESTING