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Minoru Kanda
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Yokohama-shi, JP
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Patents Grants
last 30 patents
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Patent Grant
Matching circuit and plasma processing apparatus
Patent number
6,707,253
Issue date
Mar 16, 2004
Matsushita Electric Industrial Co., Ltd.
Kenji Sumida
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
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Patent Application
Heat treatment apparatus and method
Publication number
20050023266
Publication date
Feb 3, 2005
Futek Furnace Inc.
Hiroto Ueno
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
Matching circuit and plasma processing apparatus
Publication number
20030136519
Publication date
Jul 24, 2003
Kenji Sumida
H01 - BASIC ELECTRIC ELEMENTS