Minoru KUBOTA

Person

Koshi City, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate processing apparatus, substrate processing method, and co...
- Patent number 11,524,383
- Issue date Dec 13, 2022
- Tokyo Electron Limited
- Minoru Kubota
- B24 - GRINDING POLISHING
Information Patent Grant
Developing method, computer-readable storage medium and developing...
- Patent number 10,921,713
- Issue date Feb 16, 2021
- Tokyo Electron Limited
- Koshi Muta
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Developing method, computer-readable storage medium and developing...
- Patent number 10,459,340
- Issue date Oct 29, 2019
- Tokyo Electron Limited
- Koshi Muta
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Developing treatment method, non-transitory computer storage medium...
- Patent number 10,281,822
- Issue date May 7, 2019
- Tokyo Electron Limited
- Minoru Kubota
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Peripheral exposure method and apparatus therefor
- Patent number 10,126,665
- Issue date Nov 13, 2018
- Tokyo Electron Limited
- Kenichi Miyamoto
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Coating method, computer storage medium and coating apparatus
- Patent number 10,048,664
- Issue date Aug 14, 2018
- Tokyo Electron Limited
- Takafumi Hasimoto
- G05 - CONTROLLING REGULATING
Information Patent Grant
Coating apparatus, coating method and storage medium
- Patent number 9,776,199
- Issue date Oct 3, 2017
- Tokyo Electron Limited
- Minoru Kubota
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Peripheral exposure method and apparatus therefor
- Patent number 9,268,230
- Issue date Feb 23, 2016
- Tokyo Electron Limited
- Kenichi Miyamoto
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Liquid processing apparatus, liquid processing method and storage m...
- Patent number 9,217,922
- Issue date Dec 22, 2015
- Tokyo Electron Limited
- Minoru Kubota
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Substrate processing unit
- Patent number 6,682,629
- Issue date Jan 27, 2004
- Tokyo Electron Limited
- Hiroyuki Kudo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and method for washing substrate
- Patent number 6,379,469
- Issue date Apr 30, 2002
- Tokyo Electron Limited
- Hideya Tanaka
- B08 - CLEANING
Information Patent Grant
Apparatus and method for washing substrate
- Patent number 6,158,075
- Issue date Dec 12, 2000
- Tokyo Electron Limited
- Hideya Tanaka
- B08 - CLEANING
Information Patent Grant
Apparatus and method for washing substrate
- Patent number 6,059,891
- Issue date May 9, 2000
- Tokyo Electron Limited
- Minoru Kubota
- B08 - CLEANING

Patents Applicationslast 30 patents

Information Patent Application
Developing Method, Computer-Readable Storage Medium and Developing...
- Publication number 20190391496
- Publication date Dec 26, 2019
- TOKYO ELECTRON LIMITED
- Koshi MUTA
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND CO...
- Publication number 20190084118
- Publication date Mar 21, 2019
- TOKYO ELECTRON LIMITED
- Minoru Kubota
- B24 - GRINDING POLISHING
Information Patent Application
DEVELOPING TREATMENT METHOD, NON-TRANSITORY COMPUTER STORAGE MEDIUM...
- Publication number 20170090292
- Publication date Mar 30, 2017
- TOKYO ELECTRON LIMITED
- Minoru KUBOTA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
COATING METHOD, COMPUTER STORAGE MEDIUM AND COATING APPARATUS
- Publication number 20160167079
- Publication date Jun 16, 2016
- TOKYO ELECTRON LIMITED
- Takafumi HASIMOTO
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
DEVELOPING METHOD, COMPUTER-READABLE STORAGE MEDIUM AND DEVELOPING...
- Publication number 20160154311
- Publication date Jun 2, 2016
- TOKYO ELECTRON LIMITED
- Koshi MUTA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Peripheral Exposure Method and Apparatus Therefor
- Publication number 20160124324
- Publication date May 5, 2016
- TOKYO ELECTRON LIMITED
- Kenichi MIYAMOTO
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
COATING APPARATUS, COATING METHOD AND STORAGE MEDIUM
- Publication number 20150258570
- Publication date Sep 17, 2015
- TOKYO ELECTRON LIMITED
- Minoru KUBOTA
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
LIQUID SUPPLYING APPARATUS
- Publication number 20150165458
- Publication date Jun 18, 2015
- TOKYO ELECTRON LIMITED
- Hideo FUNAKOSHI
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
LIQUID PROCESSING APPARATUS, LIQUID PROCESSING METHOD AND STORAGE M...
- Publication number 20140030423
- Publication date Jan 30, 2014
- TOKYO ELECTRON LIMITED
- Minoru KUBOTA
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
PERIPHERAL EXPOSURE METHOD AND APPARATUS THEREFOR
- Publication number 20130224639
- Publication date Aug 29, 2013
- TOKYO ELECTRON LIMITED
- Kenichi MIYAMOTO
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Substrate processing unit
- Publication number 20020079056
- Publication date Jun 27, 2002
- Hiroyuki Kudo
- H01 - BASIC ELECTRIC ELEMENTS

Minoru KUBOTA

Person

Patents Grantslast 30 patents

Substrate processing apparatus, substrate processing method, and co...

Developing method, computer-readable storage medium and developing...

Developing method, computer-readable storage medium and developing...

Developing treatment method, non-transitory computer storage medium...

Peripheral exposure method and apparatus therefor

Coating method, computer storage medium and coating apparatus

Coating apparatus, coating method and storage medium

Peripheral exposure method and apparatus therefor

Liquid processing apparatus, liquid processing method and storage m...

Substrate processing unit

Apparatus and method for washing substrate

Apparatus and method for washing substrate

Apparatus and method for washing substrate

Patents Applicationslast 30 patents

Developing Method, Computer-Readable Storage Medium and Developing...

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND CO...

DEVELOPING TREATMENT METHOD, NON-TRANSITORY COMPUTER STORAGE MEDIUM...

COATING METHOD, COMPUTER STORAGE MEDIUM AND COATING APPARATUS

DEVELOPING METHOD, COMPUTER-READABLE STORAGE MEDIUM AND DEVELOPING...

Peripheral Exposure Method and Apparatus Therefor

COATING APPARATUS, COATING METHOD AND STORAGE MEDIUM

LIQUID SUPPLYING APPARATUS

LIQUID PROCESSING APPARATUS, LIQUID PROCESSING METHOD AND STORAGE M...

PERIPHERAL EXPOSURE METHOD AND APPARATUS THEREFOR

Substrate processing unit