Minoru OBATA

Person

Nirasaki City, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Film forming method, film forming apparatus and storage medium
- Patent number 9,562,285
- Issue date Feb 7, 2017
- Tokyo Electron Limited
- Keisuke Suzuki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Life estimating method for heater wire, heating apparatus, storage...
- Patent number 8,121,799
- Issue date Feb 21, 2012
- Tokyo Electron Limited
- Nobutoshi Terasawa
- F27 - FURNACES KILNS OVENS RETORTS
Information Patent Grant
Server device and program
- Patent number 8,055,391
- Issue date Nov 8, 2011
- Tokyo Electron Limited
- Masashi Takahashi
- G05 - CONTROLLING REGULATING
Information Patent Grant
Server device and program with sub-recipe measurement communication
- Patent number 7,974,729
- Issue date Jul 5, 2011
- Tokyo Electron Limited
- Masashi Takahashi
- G05 - CONTROLLING REGULATING
Information Patent Grant
Information processing apparatus, semiconductor manufacturing syste...
- Patent number 7,869,888
- Issue date Jan 11, 2011
- Tokyo Electron Limited
- Noriaki Koyama
- G05 - CONTROLLING REGULATING
Information Patent Grant
Semiconductor manufacturing apparatus, method of detecting abnormal...
- Patent number 7,751,921
- Issue date Jul 6, 2010
- Tokyo Electron Limited
- Koichi Sakamoto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
FILM FORMING METHOD, FILM FORMING APPARATUS AND STORAGE MEDIUM
- Publication number 20150259796
- Publication date Sep 17, 2015
- TOKYO ELECTRON LIMITED
- Keisuke SUZUKI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
LIFE ESTIMATING METHOD FOR HEATER WIRE, HEATING APPARATUS, STORAGE...
- Publication number 20120169505
- Publication date Jul 5, 2012
- TOKYO ELECTRON LIMITED
- Nobutoshi Terasawa
- F27 - FURNACES KILNS OVENS RETORTS
Information Patent Application
INFORMATION PROCESSING APPARATUS, SEMICONDUCTOR MANUFACTURING SYSTE...
- Publication number 20110035165
- Publication date Feb 10, 2011
- TOKYO ELECTRON LIMITED
- Noriaki KOYAMA
- G05 - CONTROLLING REGULATING
Information Patent Application
SERVER DEVICE AND PROGRAM
- Publication number 20090276076
- Publication date Nov 5, 2009
- TOKYO ELECTRON LIMITED
- Masashi Takahashi
- G05 - CONTROLLING REGULATING
Information Patent Application
SERVER DEVICE AND PROGRAM
- Publication number 20090265027
- Publication date Oct 22, 2009
- TOKYO ELECTRON LIMITED
- Masashi Takahashi
- G05 - CONTROLLING REGULATING
Information Patent Application
Substrate processing apparatus and method of controlling substrate...
- Publication number 20090110824
- Publication date Apr 30, 2009
- TOKYO ELECTRON LIMITED
- Yuichi Takenaga
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Life estimating method for heater wire, heating apparatus, storage...
- Publication number 20080262791
- Publication date Oct 23, 2008
- TOKYO ELECTRON LIMITED
- Nobutoshi Terasawa
- F27 - FURNACES KILNS OVENS RETORTS
Information Patent Application
Semiconductor Manufacturing Apparatus, Method of Detecting Abnormal...
- Publication number 20080208385
- Publication date Aug 28, 2008
- Koichi Sakamoto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
INFORMATION PROCESSING APPARATUS, SEMICONDUCTOR MANUFACTURING SYSTE...
- Publication number 20070282554
- Publication date Dec 6, 2007
- TOKYO ELECTRON LIMITED
- Noriaki KOYAMA
- G05 - CONTROLLING REGULATING

Minoru OBATA

Person

Patents Grantslast 30 patents

Film forming method, film forming apparatus and storage medium

Life estimating method for heater wire, heating apparatus, storage...

Server device and program

Server device and program with sub-recipe measurement communication

Information processing apparatus, semiconductor manufacturing syste...

Semiconductor manufacturing apparatus, method of detecting abnormal...

Patents Applicationslast 30 patents

FILM FORMING METHOD, FILM FORMING APPARATUS AND STORAGE MEDIUM

LIFE ESTIMATING METHOD FOR HEATER WIRE, HEATING APPARATUS, STORAGE...

INFORMATION PROCESSING APPARATUS, SEMICONDUCTOR MANUFACTURING SYSTE...

SERVER DEVICE AND PROGRAM

SERVER DEVICE AND PROGRAM

Substrate processing apparatus and method of controlling substrate...

Life estimating method for heater wire, heating apparatus, storage...

Semiconductor Manufacturing Apparatus, Method of Detecting Abnormal...

INFORMATION PROCESSING APPARATUS, SEMICONDUCTOR MANUFACTURING SYSTE...