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Minoru Sakamoto
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Ibaraki-ken, JP
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last 30 patents
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Patent Grant
Semiconductor device manufacturing method and substrate processing...
Patent number
8,293,646
Issue date
Oct 23, 2012
Hitachi Kokusai Electric Inc.
Takashi Ozaki
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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last 30 patents
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Patent Application
Semiconductor device manufacturing method and substrate processing...
Publication number
20090117752
Publication date
May 7, 2009
Hitachi Kokusai Electric Inc.
Takashi Ozaki
C30 - CRYSTAL GROWTH