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Minoru Tanaka
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Yokohama, JP
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last 30 patents
Information
Patent Grant
Projection exposure apparatus and projection exposure method
Patent number
6,094,268
Issue date
Jul 25, 2000
Hitachi, Ltd.
Yoshitada Oshida
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Projection exposure apparatus and projection exposure method
Patent number
5,227,862
Issue date
Jul 13, 1993
Hitachi, Ltd.
Yoshitada Oshida
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Information detecting system of scanning type
Patent number
5,121,449
Issue date
Jun 9, 1992
Hitachi, Ltd.
Masataka Shiba
G02 - OPTICS
Information
Patent Grant
Illuminating method and illuminating apparatus for carrying out the...
Patent number
5,016,149
Issue date
May 14, 1991
Hitachi, Ltd.
Minoru Tanaka
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Apparatus for testing semiconductor device
Patent number
4,931,726
Issue date
Jun 5, 1990
Hitachi, Ltd.
Susumu Kasukabe
G01 - MEASURING TESTING
Information
Patent Grant
Method of and apparatus for detecting foreign substances
Patent number
4,740,079
Issue date
Apr 26, 1988
Hitachi, Ltd.
Mitsuyoshi Koizumi
G01 - MEASURING TESTING
Information
Patent Grant
Very-low-temperature fiberscope
Patent number
4,707,075
Issue date
Nov 17, 1987
Kabushiki Kaisha Toshiba
Eiji Fukushima
G02 - OPTICS