Minoru Tashiro

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Kumamoto, JP

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Patents Grantslast 30 patents

Information Patent Grant
Substrate storage apparatus, substrate storage method, and recordin...
- Patent number 11,699,608
- Issue date Jul 11, 2023
- Tokyo Electron Limited
- Akihiro Matsumoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 10,668,494
- Issue date Jun 2, 2020
- Tokyo Electron Limited
- Go Ayabe
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE LIQUID PROCESSING APPARATUS AND LIQUID DISCHARGE EVALUATI...
- Publication number 20210260612
- Publication date Aug 26, 2021
- TOKYO ELECTRON LIMITED
- Terufumi Wakiyama
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
SUBSTRATE STORAGE APPARATUS, SUBSTRATE STORAGE METHOD, AND RECORDIN...
- Publication number 20200058531
- Publication date Feb 20, 2020
- TOKYO ELECTRON LIMITED
- Akihiro MATSUMOTO
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20180085769
- Publication date Mar 29, 2018
- TOKYO ELECTRON LIMITED
- Go Ayabe
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...