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Minoru Toriumi
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Hachioji, JP
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last 30 patents
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Patent Grant
Method for forming a pattern and forming a thin film used in patter...
Patent number
5,512,328
Issue date
Apr 30, 1996
Hitachi, Ltd.
Toshiyuki Yoshimura
B82 - NANO-TECHNOLOGY
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Patent Grant
Photosensitive composition
Patent number
4,792,516
Issue date
Dec 20, 1988
Hitachi Chemical Company
Minoru Toriumi
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY