Minoru Toriumi

Person

Ibaraki, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Photosensitive composition and pattern formation method
- Patent number 10,095,108
- Issue date Oct 9, 2018
- Evolving nano process Infrastructure Development Center, Inc.
- Minoru Toriumi
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Photosensitive composition, method for forming pattern, and method...
- Patent number 8,163,462
- Issue date Apr 24, 2012
- Renesas Electronics Corporation
- Minoru Toriumi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Resist composition and method for manufacturing semiconductor devic...
- Patent number 6,803,170
- Issue date Oct 12, 2004
- Semiconductor Leading Edge Technologies, Inc.
- Minoru Toriumi
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Pattern forming method and projection exposure tool therefor
- Patent number 5,621,497
- Issue date Apr 15, 1997
- Hitachi, Ltd.
- Tsuneo Terasawa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
PHOTOSENSITIVE COMPOSITION AND PATTERN FORMATION METHOD
- Publication number 20170277036
- Publication date Sep 28, 2017
- Evolving nano process infrastructure Development Center, Inc.
- MINORU TORIUMI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Photosensitive composition, method for forming pattern, and method...
- Publication number 20090317742
- Publication date Dec 24, 2009
- NEC Electronics Corporation
- Minoru Toriumi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Process for preparing fluorine-containing polymer and photoresist c...
- Publication number 20050191578
- Publication date Sep 1, 2005
- Daikin Industries, Ltd.
- Takayuki Araki
- C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information Patent Application
Method of forming fine pattern
- Publication number 20040248042
- Publication date Dec 9, 2004
- Minoru Toriumi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method of forming fine pattern
- Publication number 20040234899
- Publication date Nov 25, 2004
- Minoru Toriumi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Fine pattern forming method
- Publication number 20040101787
- Publication date May 27, 2004
- Takuya Naito
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Composition for anti-reflective coating and method for manufacturin...
- Publication number 20040059033
- Publication date Mar 25, 2004
- Semiconductor Leading Edge Technologies, Inc.
- Minoru Toriumi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Resist composition and method for manufacturing semiconductor devic...
- Publication number 20020022193
- Publication date Feb 21, 2002
- Semiconductor Leading Edge Technologies, Inc.
- Minoru Toriumi
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC

Minoru Toriumi

Person

Patents Grantslast 30 patents

Photosensitive composition and pattern formation method

Photosensitive composition, method for forming pattern, and method...

Resist composition and method for manufacturing semiconductor devic...

Pattern forming method and projection exposure tool therefor

Patents Applicationslast 30 patents

PHOTOSENSITIVE COMPOSITION AND PATTERN FORMATION METHOD

Photosensitive composition, method for forming pattern, and method...

Process for preparing fluorine-containing polymer and photoresist c...

Method of forming fine pattern

Method of forming fine pattern

Fine pattern forming method

Composition for anti-reflective coating and method for manufacturin...

Resist composition and method for manufacturing semiconductor devic...