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Minoru Yatomi

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  • Kudamatsu, JP
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Patents Grantslast 30 patents

  • Information Patent Grant

    Vacuum processing apparatus
    • Patent number 8,100,620
    • Issue date Jan 24, 2012
    • Hitachi High-Technologies Corporation
    • Masakazu Isozaki
    • H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

  • Information Patent Application

    VACUUM PROCESSING APPARATUS
    • Publication number 20090324367
    • Publication date Dec 31, 2009
    • Masakazu Isozaki
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    VACUUM PROCESSING APPARATUS
    • Publication number 20090214399
    • Publication date Aug 27, 2009
    • Minoru Yatomi
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    VACUUM PROCESSING APPARATUS
    • Publication number 20090165952
    • Publication date Jul 2, 2009
    • Susumu Tauchi
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Plasma processing apparatus
    • Publication number 20060054278
    • Publication date Mar 16, 2006
    • Akitaka Makino
    • H01 - BASIC ELECTRIC ELEMENTS