Minoru Yoshii

Person

Utsunomiya-shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Optical coherence tomography apparatus and method
- Patent number 9,052,179
- Issue date Jun 9, 2015
- Canon Kabushiki Kaisha
- Yukihiro Inoue
- G01 - MEASURING TESTING
Information Patent Grant
Exposure apparatus and device manufacturing method
- Patent number 7,508,493
- Issue date Mar 24, 2009
- Canon Kabushiki Kaisha
- Seiji Takeuchi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Phase measuring method and apparatus for measuring characterization...
- Patent number 7,327,467
- Issue date Feb 5, 2008
- Canon Kabushiki Kaisha
- Seiji Takeuchi
- G01 - MEASURING TESTING
Information Patent Grant
Phase measurement apparatus for measuring characterization of optic...
- Patent number 7,030,998
- Issue date Apr 18, 2006
- Canon Kabushiki Kaisha
- Seiji Takeuchi
- G01 - MEASURING TESTING
Information Patent Grant
Position detecting system and exposure apparatus using the same
- Patent number 6,972,847
- Issue date Dec 6, 2005
- Canon Kabushiki Kaisha
- Hideki Ina
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Position detecting system and exposure apparatus using the same
- Patent number 6,906,805
- Issue date Jun 14, 2005
- Canon Kabushiki Kaisha
- Hideki Ina
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Aligning method, aligner, and device manufacturing method
- Patent number 6,714,302
- Issue date Mar 30, 2004
- Canon Kabushiki Kaisha
- Akiyoshi Suzuki
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Alignment method and exposure apparatus using the same
- Patent number 6,636,311
- Issue date Oct 21, 2003
- Canon Kabushiki Kaisha
- Hideki Ina
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Exposure apparatus
- Patent number 6,594,012
- Issue date Jul 15, 2003
- Canon Kabushiki Kaisha
- Seiji Takeuchi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Position sensor having a reflective projecting system and device fa...
- Patent number 6,124,601
- Issue date Sep 26, 2000
- Canon Kabushiki Kaisha
- Minoru Yoshii
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Surface position detecting system and device manufacturing method u...
- Patent number 6,040,909
- Issue date Mar 21, 2000
- Canon Kabushiki Kaisha
- Masanobu Hasegawa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Surface position detecting system and exposure apparatus using the...
- Patent number 5,969,820
- Issue date Oct 19, 1999
- Canon Kabushiki Kaisha
- Minoru Yoshii
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Optical inspection method and apparatus including intensity modulat...
- Patent number 5,861,952
- Issue date Jan 19, 1999
- Canon Kabushiki Kaisha
- Toshihiko Tsuji
- G01 - MEASURING TESTING
Information Patent Grant
Surface position detecting system and projection exposure apparatus...
- Patent number 5,834,767
- Issue date Nov 10, 1998
- Canon Kabushiki Kaisha
- Masanobu Hasegawa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure state detecting system and exposure apparatus using the same
- Patent number 5,777,744
- Issue date Jul 7, 1998
- Canon Kabushiki Kaisha
- Minoru Yoshii
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Inspection system and device manufacturing method using the same
- Patent number 5,767,962
- Issue date Jun 16, 1998
- Canon Kabushiki Kaisha
- Masayuki Suzuki
- G01 - MEASURING TESTING
Information Patent Grant
Positional deviation measuring device and method for measuring the...
- Patent number 5,751,426
- Issue date May 12, 1998
- Canon Kabushiki Kaisha
- Noriyuki Nose
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Best focus determining method
- Patent number 5,750,294
- Issue date May 12, 1998
- Canon Kabushiki Kaisha
- Masanobu Hasegawa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Apparatus for detecting foreign matter on a substrate, and an expos...
- Patent number 5,742,386
- Issue date Apr 21, 1998
- Canon Kabushiki Kaisha
- Noriyuki Nose
- G01 - MEASURING TESTING
Information Patent Grant
Movement detection device and focus detection apparatus using such...
- Patent number 5,729,290
- Issue date Mar 17, 1998
- Canon Kabushiki Kaisha
- Jun Tokumitsu
- G02 - OPTICS
Information Patent Grant
Two scanning probes information recording/reproducing system with o...
- Patent number 5,721,721
- Issue date Feb 24, 1998
- Canon Kabushiki Kaisha
- Yoshihiro Yanagisawa
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Inspection system for original with pellicle
- Patent number 5,652,657
- Issue date Jul 29, 1997
- Canon Kabushiki Kaisha
- Minoru Yoshii
- G01 - MEASURING TESTING
Information Patent Grant
Displacement detecting system, an expose apparatus, and a device ma...
- Patent number 5,610,715
- Issue date Mar 11, 1997
- Canon Kabushiki Kaisha
- Minoru Yoshii
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Apparatus and method for detecting a relative displacement between...
- Patent number 5,610,718
- Issue date Mar 11, 1997
- Canon Kabushiki Kaisha
- Koichi Sentoku
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Measuring apparatus utilizing diffraction of reflected and transmit...
- Patent number 5,541,729
- Issue date Jul 30, 1996
- Canon Kabushiki Kaisha
- Seiji Takeuchi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Movement detection device and focus detection apparatus using such...
- Patent number 5,526,044
- Issue date Jun 11, 1996
- Canon Kabushiki Kaisha
- Jun Tokumitsu
- G02 - OPTICS
Information Patent Grant
Displacement detection apparatus
- Patent number 5,523,844
- Issue date Jun 4, 1996
- Canon Kabushiki Kaisha
- Masanobu Hasegawa
- G01 - MEASURING TESTING
Information Patent Grant
Encoder for controlling measurements in the range of a few angstroms
- Patent number 5,519,686
- Issue date May 21, 1996
- Canon Kabushiki Kaisha
- Yoshihiro Yanagisawa
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Inspection method and apparatus for inspecting a particle, if any,...
- Patent number 5,486,919
- Issue date Jan 23, 1996
- Canon Kabushiki Kaisha
- Toshihiko Tsuji
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Inspection apparatus for detecting foreign matter on a surface to b...
- Patent number 5,461,474
- Issue date Oct 24, 1995
- Canon Kabushiki Kaisha
- Minoru Yoshii
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
OPTICAL COHERENCE TOMOGRAPHIC IMAGING APPARATUS
- Publication number 20140029013
- Publication date Jan 30, 2014
- Minoru Yoshii
- G01 - MEASURING TESTING
Information Patent Application
OPTICAL COHERENCE TOMOGRAPHY APPARATUS AND METHOD
- Publication number 20130169973
- Publication date Jul 4, 2013
- Canon Kabushiki Kaisha
- Yukihiro Inoue
- G01 - MEASURING TESTING
Information Patent Application
LIGHT SOURCE DEVICE AND OPTICAL COHERENCE TOMOGRAPHY APPARATUS
- Publication number 20130027714
- Publication date Jan 31, 2013
- Canon Kabushiki Kaisha
- Minoru Yoshii
- G01 - MEASURING TESTING
Information Patent Application
SWEPT LIGHT SOURCE APPARATUS AND IMAGING SYSTEM INCLUDING THE SAME
- Publication number 20120307257
- Publication date Dec 6, 2012
- Canon Kabushiki Kaisha
- Minoru Yoshii
- G01 - MEASURING TESTING
Information Patent Application
LIGHT SOURCE APPARATUS
- Publication number 20120127464
- Publication date May 24, 2012
- Canon Kabushiki Kaisha
- Makoto Oigawa
- G01 - MEASURING TESTING
Information Patent Application
EXPOSURE APPARATUS AND DEVICE MANUFACTURING METHOD
- Publication number 20070188730
- Publication date Aug 16, 2007
- Seiji Takeuchi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Phase measuring method and apparatus for measuring characterization...
- Publication number 20060055940
- Publication date Mar 16, 2006
- Seiji Takeuchi
- G01 - MEASURING TESTING
Information Patent Application
POSITION DETECTING SYSTEM AND EXPOSURE APPARATUS USING THE SAME
- Publication number 20050195405
- Publication date Sep 8, 2005
- Canon Kabushiki Kaisha
- Hideki Ina
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Phase measuring method and apparatus
- Publication number 20030144819
- Publication date Jul 31, 2003
- Seiji Takeuchi
- G01 - MEASURING TESTING
Information Patent Application
EXPOSURE APPARATUS
- Publication number 20020093656
- Publication date Jul 18, 2002
- SEIJI TAKEUCHI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
ALIGNING METHOD, ALIGNER, AND DEVICE MANUFACTURING METHOD
- Publication number 20020024671
- Publication date Feb 28, 2002
- AKIYOSHI SUZUKI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Minoru Yoshii

Person

Patents Grantslast 30 patents

Optical coherence tomography apparatus and method

Exposure apparatus and device manufacturing method

Phase measuring method and apparatus for measuring characterization...

Phase measurement apparatus for measuring characterization of optic...

Position detecting system and exposure apparatus using the same

Position detecting system and exposure apparatus using the same

Aligning method, aligner, and device manufacturing method

Alignment method and exposure apparatus using the same

Exposure apparatus

Position sensor having a reflective projecting system and device fa...

Surface position detecting system and device manufacturing method u...

Surface position detecting system and exposure apparatus using the...

Optical inspection method and apparatus including intensity modulat...

Surface position detecting system and projection exposure apparatus...

Exposure state detecting system and exposure apparatus using the same

Inspection system and device manufacturing method using the same

Positional deviation measuring device and method for measuring the...

Best focus determining method

Apparatus for detecting foreign matter on a substrate, and an expos...

Movement detection device and focus detection apparatus using such...

Two scanning probes information recording/reproducing system with o...

Inspection system for original with pellicle

Displacement detecting system, an expose apparatus, and a device ma...

Apparatus and method for detecting a relative displacement between...

Measuring apparatus utilizing diffraction of reflected and transmit...

Movement detection device and focus detection apparatus using such...

Displacement detection apparatus

Encoder for controlling measurements in the range of a few angstroms

Inspection method and apparatus for inspecting a particle, if any,...

Inspection apparatus for detecting foreign matter on a surface to b...

Patents Applicationslast 30 patents

OPTICAL COHERENCE TOMOGRAPHIC IMAGING APPARATUS

OPTICAL COHERENCE TOMOGRAPHY APPARATUS AND METHOD

LIGHT SOURCE DEVICE AND OPTICAL COHERENCE TOMOGRAPHY APPARATUS

SWEPT LIGHT SOURCE APPARATUS AND IMAGING SYSTEM INCLUDING THE SAME

LIGHT SOURCE APPARATUS

EXPOSURE APPARATUS AND DEVICE MANUFACTURING METHOD

Phase measuring method and apparatus for measuring characterization...

POSITION DETECTING SYSTEM AND EXPOSURE APPARATUS USING THE SAME

Phase measuring method and apparatus

EXPOSURE APPARATUS

ALIGNING METHOD, ALIGNER, AND DEVICE MANUFACTURING METHOD