Minshik KIM

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Seoul, KR

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Patents Grantslast 30 patents

Information Patent Grant
Side gas injector for plasma reaction chamber
- Patent number 8,652,296
- Issue date Feb 18, 2014
- DMS Co., Ltd.
- Minshik Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Workpiece de-chucking device of plasma reactor for dry-cleaning ins...
- Patent number 8,398,783
- Issue date Mar 19, 2013
- DMS Co., Ltd.
- Byoungil Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma reactor and etching method using the same
- Patent number 8,323,522
- Issue date Dec 4, 2012
- DMS Co., Ltd.
- Hyeokjin Jang
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
PLASMA REACTOR AND ETCHING METHOD USING THE SAME
- Publication number 20110155694
- Publication date Jun 30, 2011
- Hyeokjin JANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS FOR CONTROLLING TEMPERATURE OF ELECTROSTATIC CHUCK COMPRI...
- Publication number 20110154843
- Publication date Jun 30, 2011
- Sungyong KO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SIDE GAS INJECTOR FOR PLASMA REACTION CHAMBER
- Publication number 20110079356
- Publication date Apr 7, 2011
- Minshik Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WORKPIECE DE-CHUCKING DEVICE OF PLASMA REACTOR FOR DRY-CLEANING INS...
- Publication number 20110056514
- Publication date Mar 10, 2011
- Byoungil LEE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
COLOR SYSTEM FOR ETCHING GAS
- Publication number 20110049111
- Publication date Mar 3, 2011
- Sungyong KO
- G05 - CONTROLLING REGULATING
Information Patent Application
ELECTROSTATIC CHUCK ASSEMBLY FOR PLASMA REACTOR
- Publication number 20100110605
- Publication date May 6, 2010
- Weonmook LEE
- H01 - BASIC ELECTRIC ELEMENTS