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Mircea Dusa
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Wezembeek-Oppem, BE
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Patents Grants
last 30 patents
Information
Patent Grant
Method of preparing a pattern, method of forming a mask set, device...
Patent number
8,945,800
Issue date
Feb 3, 2015
ASML Netherlands B.V.
Tsann-Bim Chiou
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Method and system for increasing alignment target contrast
Patent number
8,625,096
Issue date
Jan 7, 2014
ASML Holding N.V.
Harry Sewell
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Apparatus and method for providing resist alignment marks in a doub...
Patent number
8,329,366
Issue date
Dec 11, 2012
ASML Netherlands B.V.
Maya Angelova Doytcheva
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Patents Applications
last 30 patents
Information
Patent Application
METHOD OF PREPARING A PATTERN, METHOD OF FORMING A MASK SET, DEVICE...
Publication number
20140051016
Publication date
Feb 20, 2014
ASML NETHERLANDS B.V.
Tsann-Bim CHIOU
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
Apparatus and Method for Providing Resist Alignment Marks in a Doub...
Publication number
20130017378
Publication date
Jan 17, 2013
ASML NETHERLANDS B.V.
Maya Angelova Doytcheva
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method and System for Increasing Alignment Target Contrast
Publication number
20110075238
Publication date
Mar 31, 2011
ASML NETHERLANDS B.V.
Harry SEWELL
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Apparatus and Method for Providing Resist Alignment Marks in a Doub...
Publication number
20100323171
Publication date
Dec 23, 2010
ASML Holding N.V.
Maya Angelova DOYTCHEVA
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY