Mirko Glass

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Freital, DE

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Patents Grantslast 30 patents

Information Patent Grant
Method for depositing thin tungsten film with low resistivity and r...
- Patent number 8,409,987
- Issue date Apr 2, 2013
- Novellus Systems, Inc.
- Anand Chandrashekar
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for depositing thin tungsten film with low resistivity and r...
- Patent number 8,058,170
- Issue date Nov 15, 2011
- Novellus Systems, Inc.
- Anand Chandrashekar
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
METHOD FOR DEPOSITING THIN TUNGSTEN FILM WITH LOW RESISTIVITY AND R...
- Publication number 20120015518
- Publication date Jan 19, 2012
- Anand Chandrashekar
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR DEPOSITING THIN TUNGSTEN FILM WITH LOW RESISTIVITY AND R...
- Publication number 20100159694
- Publication date Jun 24, 2010
- NOVELLUS SYSTEMS INC.
- Anand Chandrashekar
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...