Mirko Vogt

Person

Dresden, DE

People

Patents Grantslast 30 patents

Information Patent Grant
Light emitter devices, optical filter structures and methods for fo...
- Patent number 12,137,500
- Issue date Nov 5, 2024
- Infineon Technologies AG
- Thoralf Kautzsch
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of generating a germanium structure and optical device compr...
- Patent number 11,594,654
- Issue date Feb 28, 2023
- Infineon Technologies AG
- Andre Roeth
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Capacitive microelectromechanical device and method for forming a c...
- Patent number 11,422,151
- Issue date Aug 23, 2022
- Infineon Technologies AG
- Thoralf Kautzsch
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Producing a buried cavity in a semiconductor substrate
- Patent number 11,393,714
- Issue date Jul 19, 2022
- Infineon Technologies AG
- Andre Roeth
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Microelectromechanical device, method for manufacturing a microelec...
- Patent number 11,078,072
- Issue date Aug 3, 2021
- Infineon Technologies Dresden GmbH & Co. KG
- Thoralf Kautzsch
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Stressed decoupled micro-electro-mechanical system sensor
- Patent number 10,870,575
- Issue date Dec 22, 2020
- Infineon Technologies Dresden GmbH & Co. KG
- Horst Theuss
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Microlens having a carrier-free optical interference filter
- Patent number 10,700,221
- Issue date Jun 30, 2020
- Infineon Technologies Dresden GmbH & Co. KG
- Ines Uhlig
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Capacitive microelectromechanical device and method for forming a c...
- Patent number 10,684,306
- Issue date Jun 16, 2020
- Infineon Technologies AG
- Steffen Bieselt
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Microelectromechanical device, method for manufacturing a microelec...
- Patent number 10,683,203
- Issue date Jun 16, 2020
- Infineon Technologies Dresden GmbH
- Thoralf Kautzsch
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Light emitter devices, optical filter structures and methods for fo...
- Patent number 10,681,777
- Issue date Jun 9, 2020
- Infineon Technologies AG
- Thoralf Kautzsch
- G01 - MEASURING TESTING
Information Patent Grant
Integrated semiconductor device and manufacturing method
- Patent number 10,544,037
- Issue date Jan 28, 2020
- Infineon Technologies Dresden GmbH
- Thoralf Kautzsch
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Pressure sensor device and manufacturing method
- Patent number 10,386,255
- Issue date Aug 20, 2019
- Infineon Technologies Dresden GmbH
- Thoralf Kautzsch
- G01 - MEASURING TESTING
Information Patent Grant
Graded-index structure for optical systems
- Patent number 10,347,778
- Issue date Jul 9, 2019
- Infineon Technologies AG
- Thoralf Kautzsch
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Emitter and method for manufacturing the same
- Patent number 10,290,805
- Issue date May 14, 2019
- Infineon Technologies Dresden GmbH
- Steffen Bieselt
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Graded-index structure for optical systems
- Patent number 10,084,101
- Issue date Sep 25, 2018
- Infineon Technologies AG
- Thoralf Kautzsch
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Sensor structures, systems and methods with improved integration an...
- Patent number 10,060,816
- Issue date Aug 28, 2018
- Infineon Technologies AG
- Thoralf Kautzsch
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Integrated semiconductor device and manufacturing method
- Patent number 9,896,329
- Issue date Feb 20, 2018
- Infineon Technologies Dresden GmbH
- Thoralf Kautzsch
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Emitter and method for manufacturing the same
- Patent number 9,887,355
- Issue date Feb 6, 2018
- Infineon Technologies Desden GmbH
- Steffen Bieselt
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Sensor structures, systems and methods with improved integration an...
- Patent number 9,752,943
- Issue date Sep 5, 2017
- Infineon Technologies Dresden GmbH
- Thoralf Kautzsch
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method and structure for creating cavities with extreme aspect ratios
- Patent number 9,663,355
- Issue date May 30, 2017
- Infineon Technologies Dresden GmbH
- Thoralf Kautzsch
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method of forming a resonator
- Patent number 9,641,153
- Issue date May 2, 2017
- Infineon Technologies Dresden GmbH
- Thoralf Kautzsch
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Sensor structures, systems and methods with improved integration an...
- Patent number 9,546,923
- Issue date Jan 17, 2017
- Infineon Technologies Dresden GmbH
- Thoralf Kautzsch
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for manufacturing a micromechanical system comprising a remo...
- Patent number 9,452,923
- Issue date Sep 27, 2016
- Infineon Technologies Dresden GmbH
- Thoralf Kautzsch
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micromechanical system and method for manufacturing a micromechanic...
- Patent number 9,382,111
- Issue date Jul 5, 2016
- Infineon Technologies Dresden GmbH
- Thoralf Kautzsch
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for manufacturing a micromechanical system
- Patent number 9,376,314
- Issue date Jun 28, 2016
- Infineon Technologies Dresden GmbH
- Thoralf Kautzsch
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Systems and methods for horizontal integration of acceleration sens...
- Patent number 9,330,929
- Issue date May 3, 2016
- Infineon Technologies Dresden GmbH
- Thoralf Kautzsch
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Microelectromechanical resonators
- Patent number 9,209,778
- Issue date Dec 8, 2015
- Infineon Technologies Dresden GmbH
- Thoralf Kautzsch
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method and structure for creating cavities with extreme aspect ratios
- Patent number 9,136,136
- Issue date Sep 15, 2015
- Infineon Technologies Dresden GmbH
- Thoralf Kautzsch
- G01 - MEASURING TESTING
Information Patent Grant
Method for manufacturing an integrated circuit and an integrated ci...
- Patent number 9,107,335
- Issue date Aug 11, 2015
- Infineon Technologies AG
- Marko Lemke
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Integrated circuit, intermediate structure and a method of fabricat...
- Patent number 7,858,514
- Issue date Dec 28, 2010
- Qimonda AG
- Ulrike Roessner
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Pressure Sensing Device
- Publication number 20230332969
- Publication date Oct 19, 2023
- Infineon Technologies Dresden GmbH & Co. KG
- Marco Haubold
- G01 - MEASURING TESTING
Information Patent Application
CAPACITIVE MICROELECTROMECHANICAL DEVICE AND METHOD FOR FORMING A C...
- Publication number 20220326275
- Publication date Oct 13, 2022
- INFINEON TECHNOLOGIES AG
- Thoralf KAUTZSCH
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD OF GENERATING A GERMANIUM STRUCTURE AND OPTICAL DEVICE COMPR...
- Publication number 20220069156
- Publication date Mar 3, 2022
- INFINEON TECHNOLOGIES AG
- Andre Roeth
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PRODUCING A BURIED CAVITY IN A SEMICONDUCTOR SUBSTRATE
- Publication number 20210013087
- Publication date Jan 14, 2021
- INFINEON TECHNOLOGIES AG
- Andre ROETH
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CAPACITIVE MICROELECTROMECHANICAL DEVICE AND METHOD FOR FORMING A C...
- Publication number 20200300886
- Publication date Sep 24, 2020
- INFINEON TECHNOLOGIES AG
- Thoralf KAUTZSCH
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROELECTROMECHANICAL DEVICE, METHOD FOR MANUFACTURING A MICROELE...
- Publication number 20200290867
- Publication date Sep 17, 2020
- Infineon Technologies Dresden GmbH & Co. KG
- Thoralf KAUTZSCH
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Light Emitter Devices, Optical Filter Structures and Methods for Fo...
- Publication number 20200253000
- Publication date Aug 6, 2020
- INFINEON TECHNOLOGIES AG
- Thoralf Kautzsch
- G01 - MEASURING TESTING
Information Patent Application
STRESSED DECOUPLED MICRO-ELECTRO-MECHANICAL SYSTEM SENSOR
- Publication number 20200002159
- Publication date Jan 2, 2020
- Infineon Technologies Dresden GmbH & Co. KG
- Horst THEUSS
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Microlens Having a Carrier-Free Optical Interference Filter
- Publication number 20190123217
- Publication date Apr 25, 2019
- Infineon Technologies Dresden GmbH & Co. KG
- Ines Uhlig
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
GRADED-INDEX STRUCTURE FOR OPTICAL SYSTEMS
- Publication number 20180358483
- Publication date Dec 13, 2018
- INFINEON TECHNOLOGIES AG
- Thoralf KAUTZSCH
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MICROELECTROMECHANICAL DEVICE, METHOD FOR MANUFACTURING A MICROELEC...
- Publication number 20180297838
- Publication date Oct 18, 2018
- INFINEON TECHNOLOGIES DRESDEN GMBH
- Thoralf Kautzsch
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
EMITTER AND METHOD FOR MANUFACTURING THE SAME
- Publication number 20180159034
- Publication date Jun 7, 2018
- INFINEON TECHNOLOGIES DRESDEN GMBH
- Steffen BIESELT
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INTEGRATED SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD
- Publication number 20180155188
- Publication date Jun 7, 2018
- INFINEON TECHNOLOGIES DRESDEN GMBH
- Thoralf Kautzsch
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
GRADED-INDEX STRUCTURE FOR OPTICAL SYSTEMS
- Publication number 20180130914
- Publication date May 10, 2018
- INFINEON TECHNOLOGIES AG
- Thoralf KAUTZSCH
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PRESSURE SENSOR DEVICE AND MANUFACTURING METHOD
- Publication number 20180017456
- Publication date Jan 18, 2018
- INFINEON TECHNOLOGIES DRESDEN GMBH
- Thoralf Kautzsch
- G01 - MEASURING TESTING
Information Patent Application
Light Emitter Devices, Optical Filter Structures and Methods for Fo...
- Publication number 20170290098
- Publication date Oct 5, 2017
- INFINEON TECHNOLOGIES AG
- Thoralf Kautzsch
- G01 - MEASURING TESTING
Information Patent Application
SENSOR STRUCTURES, SYSTEMS AND METHODS WITH IMPROVED INTEGRATION AN...
- Publication number 20170089790
- Publication date Mar 30, 2017
- INFINEON TECHNOLOGIES DRESDEN GMBH
- Thoralf Kautzsch
- G01 - MEASURING TESTING
Information Patent Application
INTEGRATED SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD
- Publication number 20170015546
- Publication date Jan 19, 2017
- INFINEON TECHNOLOGIES DRESDEN GMBH
- Thoralf Kautzsch
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
CAPACITIVE MICROELECTROMECHANICAL DEVICE AND METHOD FOR FORMING A C...
- Publication number 20170010301
- Publication date Jan 12, 2017
- INFINEON TECHNOLOGIES AG
- Steffen BIESELT
- G01 - MEASURING TESTING
Information Patent Application
EMITTER AND METHOD FOR MANUFACTURING THE SAME
- Publication number 20160308084
- Publication date Oct 20, 2016
- INFINEON TECHNOLOGIES DRESDEN GMBH
- Steffen BIESELT
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Application
SYSTEMS AND METHODS FOR HORIZONTAL INTEGRATION OF ACCELERATION SENS...
- Publication number 20160185594
- Publication date Jun 30, 2016
- INFINEON TECHNOLOGIES DRESDEN GMBH
- Thoralf Kautzsch
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROELECTROMECHANICAL RESONATORS
- Publication number 20160126926
- Publication date May 5, 2016
- INFINEON TECHNOLOGIES DRESDEN GMBH
- Thoralf Kautzsch
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SYSTEMS AND METHODS FOR HORIZONTAL INTEGRATION OF ACCELERATION SENS...
- Publication number 20160104625
- Publication date Apr 14, 2016
- INFINEON TECHNOLOGIES DRESDEN GMBH
- Thoralf Kautzsch
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND STRUCTURE FOR CREATING CAVITIES WITH EXTREME ASPECT RATIOS
- Publication number 20160060106
- Publication date Mar 3, 2016
- INFINEON TECHNOLOGIES DRESDEN GMBH
- Thoralf Kautzsch
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROMECHANICAL SYSTEM AND METHOD FOR MANUFACTURING A MICROMECHANIC...
- Publication number 20150375999
- Publication date Dec 31, 2015
- INFINEON TECHNOLOGIES DRESDEN GMBH
- Thoralf Kautzsch
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROMECHANICAL SYSTEM AND METHOD FOR MANUFACTURING A MICROMECHANIC...
- Publication number 20150375998
- Publication date Dec 31, 2015
- INFINEON TECHNOLOGIES DRESDEN GMBH
- Thoralf Kautzsch
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR PROCESSING A LAYER AND A METHOD FOR MANUFACTURING AN ELE...
- Publication number 20150235864
- Publication date Aug 20, 2015
- INFINEON TECHNOLOGIES AG
- Mirko Vogt
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SENSOR STRUCTURES, SYSTEMS AND METHODS WITH IMPROVED INTEGRATION AN...
- Publication number 20150210533
- Publication date Jul 30, 2015
- INFINEON TECHNOLOGIES DRESDEN GMBH
- Thoralf Kautzsch
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR MANUFACTURING A SEMICONDUCTOR DEVICE
- Publication number 20150147839
- Publication date May 28, 2015
- INFINEON TECHNOLOGIES DRESDEN GMBH
- Alessia Scire
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND STRUCTURE FOR CREATING CAVITIES WITH EXTREME ASPECT RATIOS
- Publication number 20150079787
- Publication date Mar 19, 2015
- INFINEON TECHNOLOGIES DRESDEN GMBH
- Thoralf Kautzsch
- H01 - BASIC ELECTRIC ELEMENTS

Person

Patents Grantslast 30 patents

Light emitter devices, optical filter structures and methods for fo...

Method of generating a germanium structure and optical device compr...

Capacitive microelectromechanical device and method for forming a c...

Producing a buried cavity in a semiconductor substrate

Microelectromechanical device, method for manufacturing a microelec...

Stressed decoupled micro-electro-mechanical system sensor

Microlens having a carrier-free optical interference filter

Capacitive microelectromechanical device and method for forming a c...

Microelectromechanical device, method for manufacturing a microelec...

Light emitter devices, optical filter structures and methods for fo...

Integrated semiconductor device and manufacturing method

Pressure sensor device and manufacturing method

Graded-index structure for optical systems

Emitter and method for manufacturing the same

Graded-index structure for optical systems

Sensor structures, systems and methods with improved integration an...

Integrated semiconductor device and manufacturing method

Emitter and method for manufacturing the same

Sensor structures, systems and methods with improved integration an...

Method and structure for creating cavities with extreme aspect ratios

Method of forming a resonator

Sensor structures, systems and methods with improved integration an...

Method for manufacturing a micromechanical system comprising a remo...

Micromechanical system and method for manufacturing a micromechanic...

Method for manufacturing a micromechanical system

Systems and methods for horizontal integration of acceleration sens...

Microelectromechanical resonators

Method and structure for creating cavities with extreme aspect ratios

Method for manufacturing an integrated circuit and an integrated ci...

Integrated circuit, intermediate structure and a method of fabricat...

Patents Applicationslast 30 patents

Pressure Sensing Device

CAPACITIVE MICROELECTROMECHANICAL DEVICE AND METHOD FOR FORMING A C...

METHOD OF GENERATING A GERMANIUM STRUCTURE AND OPTICAL DEVICE COMPR...

PRODUCING A BURIED CAVITY IN A SEMICONDUCTOR SUBSTRATE

CAPACITIVE MICROELECTROMECHANICAL DEVICE AND METHOD FOR FORMING A C...

MICROELECTROMECHANICAL DEVICE, METHOD FOR MANUFACTURING A MICROELE...

Light Emitter Devices, Optical Filter Structures and Methods for Fo...

STRESSED DECOUPLED MICRO-ELECTRO-MECHANICAL SYSTEM SENSOR

Microlens Having a Carrier-Free Optical Interference Filter

GRADED-INDEX STRUCTURE FOR OPTICAL SYSTEMS

MICROELECTROMECHANICAL DEVICE, METHOD FOR MANUFACTURING A MICROELEC...

EMITTER AND METHOD FOR MANUFACTURING THE SAME

INTEGRATED SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD

GRADED-INDEX STRUCTURE FOR OPTICAL SYSTEMS

PRESSURE SENSOR DEVICE AND MANUFACTURING METHOD

Light Emitter Devices, Optical Filter Structures and Methods for Fo...

SENSOR STRUCTURES, SYSTEMS AND METHODS WITH IMPROVED INTEGRATION AN...

INTEGRATED SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD

CAPACITIVE MICROELECTROMECHANICAL DEVICE AND METHOD FOR FORMING A C...

EMITTER AND METHOD FOR MANUFACTURING THE SAME

SYSTEMS AND METHODS FOR HORIZONTAL INTEGRATION OF ACCELERATION SENS...

MICROELECTROMECHANICAL RESONATORS

SYSTEMS AND METHODS FOR HORIZONTAL INTEGRATION OF ACCELERATION SENS...

METHOD AND STRUCTURE FOR CREATING CAVITIES WITH EXTREME ASPECT RATIOS

MICROMECHANICAL SYSTEM AND METHOD FOR MANUFACTURING A MICROMECHANIC...

MICROMECHANICAL SYSTEM AND METHOD FOR MANUFACTURING A MICROMECHANIC...

METHOD FOR PROCESSING A LAYER AND A METHOD FOR MANUFACTURING AN ELE...

SENSOR STRUCTURES, SYSTEMS AND METHODS WITH IMPROVED INTEGRATION AN...

METHOD FOR MANUFACTURING A SEMICONDUCTOR DEVICE

METHOD AND STRUCTURE FOR CREATING CAVITIES WITH EXTREME ASPECT RATIOS