Misako Saito

Person

Yamanashi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate cleaning method, substrate cleaning apparatus and vacuum...
- Patent number 9,960,056
- Issue date May 1, 2018
- Tokyo Electron Limited
- Kazuya Dobashi
- B08 - CLEANING
Information Patent Grant
Substrate cleaning method, substrate cleaning device, and vacuum pr...
- Patent number 9,881,815
- Issue date Jan 30, 2018
- Tokyo Electron Limited
- Jiro Matsuo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for removing metal contamination and apparatus for removing...
- Patent number 9,875,915
- Issue date Jan 23, 2018
- Tokyo Electron Limited
- Yudai Ito
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Virus detection device and virus detection method
- Patent number 8,911,955
- Issue date Dec 16, 2014
- Tokyo Electron Limited
- Akitake Tamura
- G01 - MEASURING TESTING
Information Patent Grant
Method for analyzing quartz member
- Patent number 8,268,185
- Issue date Sep 18, 2012
- Tokyo Electron Limited
- Kazuya Dobashi
- G01 - MEASURING TESTING
Information Patent Grant
Defect inspecting method and defect inspecting apparatus
- Patent number 8,040,504
- Issue date Oct 18, 2011
- Tokyo Electron Limited
- Misako Saito
- G01 - MEASURING TESTING
Information Patent Grant
Vacuum processing apparatus and method
- Patent number 7,993,458
- Issue date Aug 9, 2011
- Tokyo Electron Limited
- Masaki Kondo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus and method for measuring the concentration of organic gas
- Patent number 7,946,152
- Issue date May 24, 2011
- Tokyo Electron Limited
- Misako Saito
- G01 - MEASURING TESTING
Information Patent Grant
Vacuum processing apparatus and method
- Patent number 7,883,582
- Issue date Feb 8, 2011
- Tokyo Electron Limited
- Masaki Kondo
Information Patent Grant
Electric wire and cable with coating/covering of polyvinyl chloride...
- Patent number 7,420,118
- Issue date Sep 2, 2008
- Tokyo Electron Limited
- Kiyoshi Watanabe
- C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information Patent Grant
Method and apparatus for treating article to be treated
- Patent number 7,208,428
- Issue date Apr 24, 2007
- Tokyo Electron Limited
- Shingo Hishiya
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electric wire coated with polyvinyl chloride resin composition and...
- Patent number 6,903,264
- Issue date Jun 7, 2005
- Tokyo Electron Limited
- Kiyoshi Watanabe
- C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information Patent Grant
Method for deciding on the timing of replacing a chemical filter, f...
- Patent number 6,537,347
- Issue date Mar 25, 2003
- Omron Corporation
- Satoshi Motouji
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Method and device for treating substrate
- Patent number 6,403,498
- Issue date Jun 11, 2002
- Tokyo Electron Limited
- Takenobu Matsuo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electronic/electric components used in clean room and substrate tre...
- Patent number 6,337,365
- Issue date Jan 8, 2002
- Tokyo Electron Limited
- Takenobu Matsuo
- C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information Patent Grant
Instrument and mounting equipment used in clean room
- Patent number 6,077,894
- Issue date Jun 20, 2000
- Tokyo Electron Limited
- Misako Saito
- A43 - FOOTWEAR

Patents Applicationslast 30 patents

Information Patent Application
LIQUID PROCESSING METHOD AND LIQUID PROCESSING APPARATUS
- Publication number 20170032984
- Publication date Feb 2, 2017
- TOKYO ELECTRON LIMITED
- Yudai ITO
- B03 - SEPARATION OF SOLID MATERIALS USING LIQUIDS OR USING PNEUMATIC TABLES O...
Information Patent Application
METHOD FOR REMOVING METAL CONTAMINATION AND APPARATUS FOR REMOVING...
- Publication number 20160175898
- Publication date Jun 23, 2016
- TOKYO ELECTRON LIMITED
- Yudai Ito
- B08 - CLEANING
Information Patent Application
SUBSTRATE CLEANING METHOD, SUBSTRATE CLEANING APPARATUS AND VACUUM...
- Publication number 20150255316
- Publication date Sep 10, 2015
- Tokyo Electron Limited
- Kazuya Dobashi
- B08 - CLEANING
Information Patent Application
SUBSTRATE CLEANING METHOD, SUBSTRATE CLEANING DEVICE, AND VACUUM PR...
- Publication number 20150007858
- Publication date Jan 8, 2015
- TOKYO ELECTRON LIMITED
- Jiro Matsuo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ORGANIC TRANSISTOR AND METHOD FOR MANUFACTURING SAME
- Publication number 20140299870
- Publication date Oct 9, 2014
- Takashi Fuse
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
VIRUS DETECTION DEVICE AND VIRUS DETECTION METHOD
- Publication number 20130244226
- Publication date Sep 19, 2013
- TOKYO ELECTRON LIMITED
- Akitake Tamura
- G01 - MEASURING TESTING
Information Patent Application
EVAPORATING APPARATUS AND EVAPORATING METHOD
- Publication number 20130209666
- Publication date Aug 15, 2013
- TOKYO ELECTRON LIMITED
- Tomiko Kamada
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
VAPOR DEPOSITION APPARATUS AND VAPOR DEPOSITION METHOD
- Publication number 20120094014
- Publication date Apr 19, 2012
- TOKYO ELECTRON LIMITED
- Yuji Ono
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DEPOSITION HEAD AND FILM FORMING APPARATUS
- Publication number 20120031339
- Publication date Feb 9, 2012
- TOKYO ELECTRON LIMITED
- Yuji Ono
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DEFECT INSPECTING METHOD AND DEFECT INSPECTING APPARATUS
- Publication number 20100245812
- Publication date Sep 30, 2010
- Tokyo Electron Limited
- Misako Saito
- G01 - MEASURING TESTING
Information Patent Application
SUBSTRATE INSPECTION DEVICE AND SUBSTRATE INSPECTION METHOD
- Publication number 20090206255
- Publication date Aug 20, 2009
- Tokyo Electron Limited
- Misako Saito
- G01 - MEASURING TESTING
Information Patent Application
SUBSTRATE INSPECTION METHOD, SUBSTRATE INSPECTION APPARATUS AND STO...
- Publication number 20090206253
- Publication date Aug 20, 2009
- TOKYO ELECTRON LIMITED
- Misako SAITO
- G01 - MEASURING TESTING
Information Patent Application
APPARATUS AND METHOD FOR MEASURING THE CONCENTRATION OF ORGANIC GAS
- Publication number 20090113991
- Publication date May 7, 2009
- TOKYO ELECTRON LIMITED
- Misako Saito
- G01 - MEASURING TESTING
Information Patent Application
Method for Analyzing Quartz Member
- Publication number 20080302762
- Publication date Dec 11, 2008
- Tokyo Electron Limited
- Kazuya Dobashi
- G01 - MEASURING TESTING
Information Patent Application
VACUUM PROCESSING APPARATUS AND METHOD
- Publication number 20080274288
- Publication date Nov 6, 2008
- TOKYO ELECTRON LIMITED
- Masaki KONDO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Vacuum processing apparatus and method of using the same
- Publication number 20060174835
- Publication date Aug 10, 2006
- Misako Saito
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Electric wire and cable with coating/covering of polyvinyl chloride...
- Publication number 20050215682
- Publication date Sep 29, 2005
- TOKYO ELECTRON LIMITED
- Kiyoshi Watanabe
- C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information Patent Application
Method and apparatus for treating article to be treated
- Publication number 20040219793
- Publication date Nov 4, 2004
- Shingo Hishiya
- C30 - CRYSTAL GROWTH
Information Patent Application
Electric wire coated with polyvinyl chloride resin compostion and c...
- Publication number 20040149482
- Publication date Aug 5, 2004
- Kiyoshi Watanabe
- C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information Patent Application
Method for deciding on the timing of replacing a chemical filter, f...
- Publication number 20020112605
- Publication date Aug 22, 2002
- OMRON CORPORATION and TOKYO ELECTRON LTD.
- Satoshi Motouji
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL

Misako Saito

Person

Patents Grantslast 30 patents

Substrate cleaning method, substrate cleaning apparatus and vacuum...

Substrate cleaning method, substrate cleaning device, and vacuum pr...

Method for removing metal contamination and apparatus for removing...

Virus detection device and virus detection method

Method for analyzing quartz member

Defect inspecting method and defect inspecting apparatus

Vacuum processing apparatus and method

Apparatus and method for measuring the concentration of organic gas

Vacuum processing apparatus and method

Electric wire and cable with coating/covering of polyvinyl chloride...

Method and apparatus for treating article to be treated

Electric wire coated with polyvinyl chloride resin composition and...

Method for deciding on the timing of replacing a chemical filter, f...

Method and device for treating substrate

Electronic/electric components used in clean room and substrate tre...

Instrument and mounting equipment used in clean room

Patents Applicationslast 30 patents

LIQUID PROCESSING METHOD AND LIQUID PROCESSING APPARATUS

METHOD FOR REMOVING METAL CONTAMINATION AND APPARATUS FOR REMOVING...

SUBSTRATE CLEANING METHOD, SUBSTRATE CLEANING APPARATUS AND VACUUM...

SUBSTRATE CLEANING METHOD, SUBSTRATE CLEANING DEVICE, AND VACUUM PR...

ORGANIC TRANSISTOR AND METHOD FOR MANUFACTURING SAME

VIRUS DETECTION DEVICE AND VIRUS DETECTION METHOD

EVAPORATING APPARATUS AND EVAPORATING METHOD

VAPOR DEPOSITION APPARATUS AND VAPOR DEPOSITION METHOD

DEPOSITION HEAD AND FILM FORMING APPARATUS

DEFECT INSPECTING METHOD AND DEFECT INSPECTING APPARATUS

SUBSTRATE INSPECTION DEVICE AND SUBSTRATE INSPECTION METHOD

SUBSTRATE INSPECTION METHOD, SUBSTRATE INSPECTION APPARATUS AND STO...

APPARATUS AND METHOD FOR MEASURING THE CONCENTRATION OF ORGANIC GAS

Method for Analyzing Quartz Member

VACUUM PROCESSING APPARATUS AND METHOD

Vacuum processing apparatus and method of using the same

Electric wire and cable with coating/covering of polyvinyl chloride...

Method and apparatus for treating article to be treated

Electric wire coated with polyvinyl chloride resin compostion and c...

Method for deciding on the timing of replacing a chemical filter, f...