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Patents Grantslast 30 patents

Information Patent Grant
Method of operating substrate processing apparatus and substrate pr...
- Patent number 8,550,875
- Issue date Oct 8, 2013
- Ebara Corporation
- Hiroomi Torii
- B24 - GRINDING POLISHING
Information Patent Grant
Method of operating substrate processing apparatus and substrate pr...
- Patent number 8,202,139
- Issue date Jun 19, 2012
- Ebara Corporation
- Hiroomi Torii
- B24 - GRINDING POLISHING

Patents Applicationslast 30 patents

Information Patent Application
METHOD OF OPERATING SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PR...
- Publication number 20120231703
- Publication date Sep 13, 2012
- Hiroomi Torii
- B24 - GRINDING POLISHING
Information Patent Application
Method of operating substrate processing apparatus and substrate pr...
- Publication number 20090186557
- Publication date Jul 23, 2009
- Hiroomi Torii
- B24 - GRINDING POLISHING