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Misuzu SATO

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Patents Grantslast 30 patents

  • Information Patent Grant

    Film forming method and film forming apparatus
    • Patent number 9,963,784
    • Issue date May 8, 2018
    • Tokyo Electron Limited
    • Hiroaki Ashizawa
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

  • Information Patent Application

    FILM FORMING METHOD AND FILM FORMING APPARATUS
    • Publication number 20150110959
    • Publication date Apr 23, 2015
    • TOKYO ELECTRON LIMITED
    • Hiroaki ASHIZAWA
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...