Mitchell Brooks

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Aptos, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Atomic layer deposition and etch for reducing roughness
- Patent number 11,170,997
- Issue date Nov 9, 2021
- Lam Research Corporation
- Xiang Zhou
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Atomic layer deposition and etch in a single plasma chamber for cri...
- Patent number 10,734,238
- Issue date Aug 4, 2020
- Lam Research Corporation
- Xiang Zhou
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Atomic layer deposition and etch for reducing roughness
- Patent number 10,658,174
- Issue date May 19, 2020
- Lam Research Corporation
- Xiang Zhou
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
ATOMIC LAYER DEPOSITION AND ETCH IN A SINGLE PLASMA CHAMBER FOR CRI...
- Publication number 20200328087
- Publication date Oct 15, 2020
- LAM RESEARCH CORPORATION
- Xiang Zhou
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ATOMIC LAYER DEPOSITION AND ETCH FOR REDUCING ROUGHNESS
- Publication number 20200243326
- Publication date Jul 30, 2020
- LAM RESEARCH CORPORATION
- Xiang Zhou
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ATOMIC LAYER DEPOSITION AND ETCH IN A SINGLE PLASMA CHAMBER FOR CRI...
- Publication number 20190157095
- Publication date May 23, 2019
- LAM RESEARCH CORPORATION
- Xiang Zhou
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ATOMIC LAYER DEPOSITION AND ETCH FOR REDUCING ROUGHNESS
- Publication number 20190157066
- Publication date May 23, 2019
- LAM RESEARCH CORPORATION
- Xiang Zhou
- H01 - BASIC ELECTRIC ELEMENTS