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SUBSTRATE PROCESSING APPARATUS
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Publication number 20220172972
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Publication date Jun 2, 2022
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Publication number 20200321232
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Publication date Oct 8, 2020
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Brooks Automation, Inc.
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Robert T. CAVENEY
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H01 - BASIC ELECTRIC ELEMENTS
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SUBSTRATE PROCESSING APPARATUS
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Publication number 20190304823
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Publication date Oct 3, 2019
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Brooks Automation, Inc.
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Robert T. Caveney
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B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
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SUBSTRATE PROCESSING APPARATUS
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Publication number 20180138066
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Publication date May 17, 2018
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Brooks Automation, Inc.
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Robert T. Caveney
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B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
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SUBSTRATE PROCESSING APPARATUS
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Publication number 20150110584
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Publication date Apr 23, 2015
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Brooks Automation, Inc.
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Ulysses Gilchrist
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B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
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SUBSTRATE PROCESSING APPARATUS
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Publication number 20120232690
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Publication date Sep 13, 2012
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Brooks Automation, Inc.
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Ulysses Gilchrist
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B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
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Compact Processing Apparatus
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Publication number 20080056856
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Publication date Mar 6, 2008
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Brooks Automation, Inc.
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Alexander G. Krupyshev
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H01 - BASIC ELECTRIC ELEMENTS
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