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Mitiaki Matsushita
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Yatsushiro, JP
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Patents Grants
last 30 patents
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Patent Grant
Substrate processing apparatus and substrate processing method
Patent number
6,746,197
Issue date
Jun 8, 2004
Tokyo Electron Limited
Yoshio Kimura
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate treatment system, substrate transfer system, and substrat...
Patent number
6,655,891
Issue date
Dec 2, 2003
Tokyo Electron Limited
Issei Ueda
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate processing apparatus and substrate processing method
Patent number
6,439,822
Issue date
Aug 27, 2002
Tokyo Electron Limited
Yoshio Kimura
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate treatment system, substrate transfer system, and substrat...
Patent number
6,425,722
Issue date
Jul 30, 2002
Tokyo Electron Limited
Issei Ueda
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Substrate treatment system, substrate transfer system, and substrat...
Patent number
6,074,154
Issue date
Jun 13, 2000
Tokyo Electron Limited
Issei Ueda
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Cleaning apparatus
Patent number
5,685,039
Issue date
Nov 11, 1997
Tokyo Electron Limited
Tomoko Hamada
A46 - BRUSHWARE
Patents Applications
last 30 patents
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Patent Application
Substrate processing apparatus and substrate processing method
Publication number
20020182040
Publication date
Dec 5, 2002
Yoshio Kimura
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Substrate treatment system, substrate transfer system, and substrat...
Publication number
20020106268
Publication date
Aug 8, 2002
Issei Ueda
H01 - BASIC ELECTRIC ELEMENTS