Mitsuaki Amemiya

Person

Saitama-shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Radiation detector and compton camera
- Patent number 11,112,511
- Issue date Sep 7, 2021
- Canon Kabushiki Kaisha
- Mitsuaki Amemiya
- G01 - MEASURING TESTING
Information Patent Grant
X-ray apparatus and its adjusting method
- Patent number 9,036,789
- Issue date May 19, 2015
- Canon Kabushiki Kaisha
- Fumitaro Masaki
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Grant
X-ray optical apparatus
- Patent number 9,020,102
- Issue date Apr 28, 2015
- Canon Kabushiki Kaisha
- Mitsuaki Amemiya
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Grant
X-ray optical apparatus and adjusting method thereof
- Patent number 9,020,104
- Issue date Apr 28, 2015
- Canon Kabushiki Kaisha
- Naoya Iizuka
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Grant
Radiation imaging apparatus
- Patent number 9,020,098
- Issue date Apr 28, 2015
- Canon Kabushiki Kaisha
- Takeo Tsukamoto
- G01 - MEASURING TESTING
Information Patent Grant
Filter exposure apparatus, and device manufacturing method
- Patent number 7,633,598
- Issue date Dec 15, 2009
- Canon Kabushiki Kaisha
- Mitsuaki Amemiya
- G02 - OPTICS
Information Patent Grant
Measuring method, exposure apparatus, and device manufacturing method
- Patent number 7,465,936
- Issue date Dec 16, 2008
- Canon Kabushiki Kaisha
- Mitsuaki Amemiya
- G01 - MEASURING TESTING
Information Patent Grant
Apparatus for evaluating EUV light source, and evaluation method us...
- Patent number 7,312,459
- Issue date Dec 25, 2007
- Canon Kabushiki Kaisha
- Mitsuaki Amemiya
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Grant
Alignment apparatus, exposure apparatus and device fabrication method
- Patent number 7,271,875
- Issue date Sep 18, 2007
- Canon Kabushiki Kaisha
- Mitsuaki Amemiya
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Apparatus and process for producing crystal article, and thermocoup...
- Patent number 7,014,707
- Issue date Mar 21, 2006
- Canon Kabushiki Kaisha
- Mitsuaki Amemiya
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Exposure method
- Patent number 6,647,087
- Issue date Nov 11, 2003
- Canon Kabushiki Kaisha
- Mitsuaki Amemiya
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
X-ray exposure apparatus
- Patent number 6,647,086
- Issue date Nov 11, 2003
- Canon Kabushiki Kaisha
- Mitsuaki Amemiya
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Grant
Device manufacturing method
- Patent number 6,645,707
- Issue date Nov 11, 2003
- Canon Kabushiki Kaisha
- Mitsuaki Amemiya
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Alignment mark detection method, and alignment method, exposure met...
- Patent number 6,642,528
- Issue date Nov 4, 2003
- Canon Kabushiki Kaisha
- Mitsuaki Amemiya
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Mask structure and method of manufacturing the same
- Patent number 6,455,203
- Issue date Sep 24, 2002
- Canon Kabushiki Kaisha
- Mitsuaki Amemiya
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
X-ray exposure apparatus
- Patent number 6,453,001
- Issue date Sep 17, 2002
- Canon Kabushiki Kaisha
- Yutaka Watanabe
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Alignment mark detection method, and alignment method, exposure met...
- Patent number 6,331,709
- Issue date Dec 18, 2001
- Canon Kabushiki Kaisha
- Mitsuaki Amemiya
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure method
- Patent number 6,327,332
- Issue date Dec 4, 2001
- Canon Kabushiki Kaisha
- Mitsuaki Amemiya
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure method
- Patent number 6,324,250
- Issue date Nov 27, 2001
- Canon Kabushiki Kaisha
- Mitsuaki Amemiya
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure method and X-ray mask structure for use with the same
- Patent number 6,272,202
- Issue date Aug 7, 2001
- Canon Kabushiki Kaisha
- Keiko Chiba
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus
- Patent number 5,835,560
- Issue date Nov 10, 1998
- Canon Kabushiki Kaisha
- Mitsuaki Amemiya
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Alignment apparatus and SOR X-ray exposure apparatus having same
- Patent number 5,822,389
- Issue date Oct 13, 1998
- Canon Kabushiki Kaisha
- Shunichi Uzawa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Process for holding an object
- Patent number 5,680,428
- Issue date Oct 21, 1997
- Canon Kabushiki Kaisha
- Mitsuaki Amemiya
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
X-ray exposure method and apparatus and device manufacturing method
- Patent number 5,606,586
- Issue date Feb 25, 1997
- Canon Kabushiki Kaisha
- Mitsuaki Amemiya
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Grant
Optical exposure method and device formed by the method
- Patent number 5,604,779
- Issue date Feb 18, 1997
- Canon Kabushiki Kaisha
- Mitsuaki Amemiya
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
SOR exposure system and method of manufacturing semiconductor devic...
- Patent number 5,581,590
- Issue date Dec 3, 1996
- Canon Kabushiki Kaisha
- Makiko Mori
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Alignment apparatus and SOR x-ray exposure apparatus having same
- Patent number 5,524,131
- Issue date Jun 4, 1996
- Canon Kabushiki Kaisha
- Shunichi Uzawa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Beam position detecting device
- Patent number 5,444,758
- Issue date Aug 22, 1995
- Canon Kabushiki Kaisha
- Akira Miyake
- G01 - MEASURING TESTING
Information Patent Grant
Length-measuring device and exposure apparatus
- Patent number 5,440,394
- Issue date Aug 8, 1995
- Canon Kabushiki Kaisha
- Noriyuki Nose
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Angle detecting device and optical apparatus, such as exposure appa...
- Patent number 5,400,386
- Issue date Mar 21, 1995
- Canon Kabushiki Kaisha
- Mitsuaki Amemiya
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
INFORMATION PROCESSING APPARATUS, MAGNETIC RESONANCE IMAGING APPARA...
- Publication number 20240201294
- Publication date Jun 20, 2024
- Canon Kabushiki Kaisha
- Mitsuaki AMEMIYA
- G01 - MEASURING TESTING
Information Patent Application
RADIATION DETECTOR AND COMPTON CAMERA
- Publication number 20200033487
- Publication date Jan 30, 2020
- Canon Kabushiki Kaisha
- Mitsuaki Amemiya
- G01 - MEASURING TESTING
Information Patent Application
RADIATION DETECTION APPARATUS
- Publication number 20160341833
- Publication date Nov 24, 2016
- Canon Kabushiki Kaisha
- Ikuo Watanabe
- G01 - MEASURING TESTING
Information Patent Application
TARGET DEVICE, LITHOGRAPHY APPARATUS, AND ARTICLE MANUFACTURING METHOD
- Publication number 20150318139
- Publication date Nov 5, 2015
- Canon Kabushiki Kaisha
- Mitsuaki Amemiya
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
RADIATION IMAGING APPARATUS
- Publication number 20130243156
- Publication date Sep 19, 2013
- Canon Kabushiki Kaisha
- Takeo Tsukamoto
- G01 - MEASURING TESTING
Information Patent Application
X-RAY APPARATUS AND ITS ADJUSTING METHOD
- Publication number 20130243163
- Publication date Sep 19, 2013
- Canon Kabushiki Kaisha
- Fumitaro Masaki
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Application
X-RAY OPTICAL APPARATUS AND ADJUSTING METHOD THEREOF
- Publication number 20130243164
- Publication date Sep 19, 2013
- Canon Kabushiki Kaisha
- Naoya Iizuka
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Application
X-RAY OPTICAL APPARATUS
- Publication number 20130235980
- Publication date Sep 12, 2013
- Canon Kabushiki Kaisha
- Mitsuaki Amemiya
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Application
FILTER EXPOSURE APPARATUS, AND DEVICE MANUFACTURING METHOD
- Publication number 20070015067
- Publication date Jan 18, 2007
- Mitsuaki Amemiya
- G02 - OPTICS
Information Patent Application
Apparatus for evalulating EUV light source, and evaluation method u...
- Publication number 20070002474
- Publication date Jan 4, 2007
- Mitsuaki Amemiya
- G02 - OPTICS
Information Patent Application
Measuring method, exposure apparatus, and device manufacturing method
- Publication number 20060186352
- Publication date Aug 24, 2006
- Mitsuaki Amemiya
- G01 - MEASURING TESTING
Information Patent Application
Alignment apparatus, exposure apparatus and device fabrication method
- Publication number 20060044538
- Publication date Mar 2, 2006
- Mitsuaki Amemiya
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Measuring apparatus, exposure apparatus having the same, and device...
- Publication number 20050270509
- Publication date Dec 8, 2005
- Nobuaki Ogushi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
DEVICE MANUFACTURING METHOD
- Publication number 20030143496
- Publication date Jul 31, 2003
- Mitsuaki Amemiya
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Alignment mark detection method, and alignment method, exposure met...
- Publication number 20020079462
- Publication date Jun 27, 2002
- Mitsuaki Amemiya
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Exposure method
- Publication number 20020025019
- Publication date Feb 28, 2002
- Mitsuaki Amemiya
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
X-ray exposure apparatus
- Publication number 20020009176
- Publication date Jan 24, 2002
- Mitsuaki Amemiya
- B82 - NANO-TECHNOLOGY
Information Patent Application
X-ray exposure apparatus
- Publication number 20010043666
- Publication date Nov 22, 2001
- Yutaka Watanabe
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING

Mitsuaki Amemiya

Person

Patents Grantslast 30 patents

Radiation detector and compton camera

X-ray apparatus and its adjusting method

X-ray optical apparatus

X-ray optical apparatus and adjusting method thereof

Radiation imaging apparatus

Filter exposure apparatus, and device manufacturing method

Measuring method, exposure apparatus, and device manufacturing method

Apparatus for evaluating EUV light source, and evaluation method us...

Alignment apparatus, exposure apparatus and device fabrication method

Apparatus and process for producing crystal article, and thermocoup...

Exposure method

X-ray exposure apparatus

Device manufacturing method

Alignment mark detection method, and alignment method, exposure met...

Mask structure and method of manufacturing the same

X-ray exposure apparatus

Alignment mark detection method, and alignment method, exposure met...

Exposure method

Exposure method

Exposure method and X-ray mask structure for use with the same

Exposure apparatus

Alignment apparatus and SOR X-ray exposure apparatus having same

Process for holding an object

X-ray exposure method and apparatus and device manufacturing method

Optical exposure method and device formed by the method

SOR exposure system and method of manufacturing semiconductor devic...

Alignment apparatus and SOR x-ray exposure apparatus having same

Beam position detecting device

Length-measuring device and exposure apparatus

Angle detecting device and optical apparatus, such as exposure appa...

Patents Applicationslast 30 patents

INFORMATION PROCESSING APPARATUS, MAGNETIC RESONANCE IMAGING APPARA...

RADIATION DETECTOR AND COMPTON CAMERA

RADIATION DETECTION APPARATUS

TARGET DEVICE, LITHOGRAPHY APPARATUS, AND ARTICLE MANUFACTURING METHOD

RADIATION IMAGING APPARATUS

X-RAY APPARATUS AND ITS ADJUSTING METHOD

X-RAY OPTICAL APPARATUS AND ADJUSTING METHOD THEREOF

X-RAY OPTICAL APPARATUS

FILTER EXPOSURE APPARATUS, AND DEVICE MANUFACTURING METHOD

Apparatus for evalulating EUV light source, and evaluation method u...

Measuring method, exposure apparatus, and device manufacturing method

Alignment apparatus, exposure apparatus and device fabrication method

Measuring apparatus, exposure apparatus having the same, and device...

DEVICE MANUFACTURING METHOD

Alignment mark detection method, and alignment method, exposure met...

Exposure method

X-ray exposure apparatus

X-ray exposure apparatus