Mitsuaki Hagio

Person

  • Kitakyushu, JP

Patents Grantslast 30 patents

Patents Applicationslast 30 patents

  • Information Patent Application

    LOAD PORT AND LOAD PORT CONTROL METHOD

    • Publication number 20090053019
    • Publication date Feb 26, 2009
    • KABUSHIKI KAISHA YASKAWA DENKI
    • Shin Osaki
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    ALIGNER

    • Publication number 20090053029
    • Publication date Feb 26, 2009
    • KABUSHIKI KAISHA YASKAWA DENKI
    • Keisuke Yoshino
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    ALIGNER, WAFER TRANSFERRING DEVICE, AND SEMICONDUCTOR PRODUCTION DE...

    • Publication number 20080095600
    • Publication date Apr 24, 2008
    • KABUSHIKI KAISHA YASKAWA DENKI
    • Mitsuaki HAGIO
    • H01 - BASIC ELECTRIC ELEMENTS