Mitsuaki MATSUO

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Fukuoka, JP

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Patents Grantslast 30 patents

Information Patent Grant
Substrate transfer robot, substrate transfer device, semiconductor...
- Patent number 8,473,096
- Issue date Jun 25, 2013
- Kabushiki Kaisha Yaskawa Denki
- Mitsuaki Matsuo
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE TRANSFER ROBOT, SUBSTRATE TRANSFER DEVICE, SEMICONDUCTOR...
- Publication number 20100209225
- Publication date Aug 19, 2010
- KABUSHIKI KAISHA YASKAWA DENKI
- Mitsuaki MATSUO
- H01 - BASIC ELECTRIC ELEMENTS