Mitsuaki Sato

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Kurokawa-gun, JP

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Patents Grantslast 30 patents

Information Patent Grant
Substrate processing apparatus
- Patent number 11,804,400
- Issue date Oct 31, 2023
- Tokyo Electron Limited
- Mitsuaki Sato
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Placing table, positioning method of edge ring and substrate proces...
- Patent number 11,664,200
- Issue date May 30, 2023
- Tokyo Electron Limited
- Yasuharu Sasaki
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
EDGE RING AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20220157573
- Publication date May 19, 2022
- TOKYO ELECTRON LIMITED
- Junichi Sasaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20210280450
- Publication date Sep 9, 2021
- TOKYO ELECTRON LIMITED
- Mitsuaki SATO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
EDGE RING AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20210183685
- Publication date Jun 17, 2021
- TOKYO ELECTRON LIMITED
- Sungjae LEE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLACING TABLE, POSITIONING METHOD OF EDGE RING AND SUBSTRATE PROCES...
- Publication number 20200144036
- Publication date May 7, 2020
- TOKYO ELECTRON LIMITED
- Yasuharu Sasaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLACING TABLE AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20200144090
- Publication date May 7, 2020
- TOKYO ELECTRON LIMITED
- Toshiya Tsukahara
- H01 - BASIC ELECTRIC ELEMENTS