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Mitsugu Nagano
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Sendai-shi Miyagi, JP
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last 30 patents
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Patent Application
PROCESS FOR PRODUCTION OF SILICON TETRAFLUORIDE, AND APPARATUS FOR...
Publication number
20090274606
Publication date
Nov 5, 2009
STELLA CHEMIFA CORPORATION
Mitsugu Nagano
B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
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Patent Application
Method and apparatus for production of high purity silicon
Publication number
20040250764
Publication date
Dec 16, 2004
Mitsugu Nagano
C30 - CRYSTAL GROWTH