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Mitsugu Yamamura
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Yokohama, JP
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last 30 patents
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Patent Grant
Alignment and exposure apparatus and method for manufacture of inte...
Patent number
5,365,342
Issue date
Nov 15, 1994
Canon Kabushiki Kaisha
Naoki Ayata
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Alignment and exposure apparatus and method for manufacture of inte...
Patent number
5,050,111
Issue date
Sep 17, 1991
Canon Kabushiki Kaisha
Naoki Ayata
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Alignment and exposure apparatus and method for manufacture of inte...
Patent number
4,937,618
Issue date
Jun 26, 1990
Canon Kabushiki Kaisha
Naoki Ayata
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Projection optical device
Patent number
4,669,842
Issue date
Jun 2, 1987
Canon Kabushiki Kaisha
Minoru Yomoda
G02 - OPTICS
Information
Patent Grant
Alignment apparatus
Patent number
4,600,282
Issue date
Jul 15, 1986
Canon Kabushiki Kaisha
Mitsugu Yamamura
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY