Mitsuharu Inaba

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Hyogo, JP

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Patents Grantslast 30 patents

Information Patent Grant
Electrostatic chuck and method of manufacturing electrostatic chuck
- Patent number 9,799,545
- Issue date Oct 24, 2017
- Tocalo Co., Ltd.
- Ryo Yamasaki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
ELECTROSTATIC CHUCK AND METHOD OF MANUFACTURING ELECTROSTATIC CHUCK
- Publication number 20150116889
- Publication date Apr 30, 2015
- TOCALO CO., LTD.
- Ryo Yamasaki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF FORMING DENSIFIED LAYER IN SPRAY COATING, AND SPRAY COATI...
- Publication number 20140302247
- Publication date Oct 9, 2014
- TOCALO CO., LTD.
- Mitsuharu Inaba
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
MEMBER FOR SEMICONDUCTOR MANUFACTURING DEVICE
- Publication number 20140300064
- Publication date Oct 9, 2014
- Tocalo Co., Ltd.
- Mitsuharu Inaba
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...