Mitsuhide Nishimura

Person

Utsunomiya-shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate processing apparatus and article manufacturing method
- Patent number 11,327,411
- Issue date May 10, 2022
- Canon Kabushiki Kaisha
- Mitsuhide Nishimura
- G05 - CONTROLLING REGULATING
Information Patent Grant
Control device, control method, lithographic apparatus, method of m...
- Patent number 11,112,701
- Issue date Sep 7, 2021
- Canon Kabushiki Kaisha
- Mitsuhide Nishimura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and article manufacturing method
- Patent number 11,048,176
- Issue date Jun 29, 2021
- Canon Kabushiki Kaisha
- Mitsuhide Nishimura
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus, method thereof, and method of manufacturing art...
- Patent number 10,635,005
- Issue date Apr 28, 2020
- Canon Kabushiki Kaisha
- Mitsuhide Nishimura
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Control device, lithography apparatus, and method of manufacturing...
- Patent number 10,558,128
- Issue date Feb 11, 2020
- Canon Kabushiki Kaisha
- Koji Yoshida
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus, exposure method, and article manufacturing method
- Patent number 10,133,177
- Issue date Nov 20, 2018
- Canon Kabushiki Kaisha
- Mitsuhide Nishimura
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
CONTROL APPARATUS, LITHOGRAPHY APPARATUS, AND ARTICLE MANUFACTURING...
- Publication number 20230057796
- Publication date Feb 23, 2023
- Canon Kabushiki Kaisha
- Mitsuhide Nishimura
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND ARTICLE MANUFACTURING METHOD
- Publication number 20210271177
- Publication date Sep 2, 2021
- Canon Kabushiki Kaisha
- Mitsuhide Nishimura
- G05 - CONTROLLING REGULATING
Information Patent Application
CONTROL DEVICE, CONTROL METHOD, LITHOGRAPHIC APPARATUS, METHOD OF M...
- Publication number 20210088914
- Publication date Mar 25, 2021
- Canon Kabushiki Kaisha
- Mitsuhide Nishimura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND ARTICLE MANUFACTURING METHOD
- Publication number 20200292948
- Publication date Sep 17, 2020
- Canon Kabushiki Kaisha
- Mitsuhide Nishimura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CONTROL DEVICE, LITHOGRAPHY APPARATUS, AND METHOD OF MANUFACTURING...
- Publication number 20190339624
- Publication date Nov 7, 2019
- Canon Kabushiki Kaisha
- Koji Yoshida
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EXPOSURE APPARATUS, METHOD THEREOF, AND METHOD OF MANUFACTURING ART...
- Publication number 20190265599
- Publication date Aug 29, 2019
- Canon Kabushiki Kaisha
- Mitsuhide Nishimura
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EXPOSURE APPARATUS, EXPOSURE METHOD, AND ARTICLE MANUFACTURING METHOD
- Publication number 20160306284
- Publication date Oct 20, 2016
- Canon Kabushiki Kaisha
- Mitsuhide Nishimura
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Mitsuhide Nishimura

Person

Patents Grantslast 30 patents

Substrate processing apparatus and article manufacturing method

Control device, control method, lithographic apparatus, method of m...

Substrate processing apparatus and article manufacturing method

Exposure apparatus, method thereof, and method of manufacturing art...

Control device, lithography apparatus, and method of manufacturing...

Exposure apparatus, exposure method, and article manufacturing method

Patents Applicationslast 30 patents

CONTROL APPARATUS, LITHOGRAPHY APPARATUS, AND ARTICLE MANUFACTURING...

SUBSTRATE PROCESSING APPARATUS AND ARTICLE MANUFACTURING METHOD

CONTROL DEVICE, CONTROL METHOD, LITHOGRAPHIC APPARATUS, METHOD OF M...

SUBSTRATE PROCESSING APPARATUS AND ARTICLE MANUFACTURING METHOD

CONTROL DEVICE, LITHOGRAPHY APPARATUS, AND METHOD OF MANUFACTURING...

EXPOSURE APPARATUS, METHOD THEREOF, AND METHOD OF MANUFACTURING ART...

EXPOSURE APPARATUS, EXPOSURE METHOD, AND ARTICLE MANUFACTURING METHOD