Membership
Tour
Register
Log in
Mitsuhiko Inaba
Follow
Person
Tokyo, JP
People
Overview
Industries
Organizations
People
Information
Impact
Patents Grants
last 30 patents
Information
Patent Grant
Substrate processing apparatus and method for removing substrate fr...
Patent number
12,020,976
Issue date
Jun 25, 2024
Ebara Corporation
Haiyang Xu
B24 - GRINDING POLISHING
Information
Patent Grant
Substrate cleaning device and substrate cleaning method
Patent number
12,002,688
Issue date
Jun 4, 2024
Ebara Corporation
Haiyang Xu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate cleaning device and substrate cleaning method
Patent number
11,996,303
Issue date
May 28, 2024
Ebara Corporation
Haiyang Xu
B24 - GRINDING POLISHING
Information
Patent Grant
Substrate processing device
Patent number
11,869,788
Issue date
Jan 9, 2024
Ebara Corporation
Koji Maeda
B08 - CLEANING
Information
Patent Grant
Cleaning device, substrate processing apparatus, maintenance method...
Patent number
11,380,561
Issue date
Jul 5, 2022
Ebara Corporation
Hidetatsu Isokawa
B08 - CLEANING
Information
Patent Grant
Substrate cleaning device and substrate cleaning method
Patent number
11,164,757
Issue date
Nov 2, 2021
Ebara Corporation
Haiyang Xu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate processing apparatus and method for removing substrate fr...
Patent number
10,991,615
Issue date
Apr 27, 2021
Ebara Corporation
Haiyang Xu
B08 - CLEANING
Information
Patent Grant
Substrate transport system, substrate processing apparatus, hand po...
Patent number
10,818,531
Issue date
Oct 27, 2020
Ebara Corporation
Kuniaki Yamaguchi
B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information
Patent Grant
Substrate processing apparatus
Patent number
10,688,622
Issue date
Jun 23, 2020
Ebara Corporation
Hiroshi Aono
B08 - CLEANING
Information
Patent Grant
Cleaning apparatus and substrate processing apparatus
Patent number
10,573,509
Issue date
Feb 25, 2020
Ebara Corporation
Koji Maeda
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
SUBSTRATE CLEANING DEVICE AND SUBSTRATE CLEANING METHOD
Publication number
20230326770
Publication date
Oct 12, 2023
EBARA CORPORATION
Haiyang Xu
B08 - CLEANING
Information
Patent Application
SUBSTRATE CLEANING DEVICE AND SUBSTRATE CLEANING METHOD
Publication number
20230307259
Publication date
Sep 28, 2023
EBARA CORPORATION
Haiyang Xu
B08 - CLEANING
Information
Patent Application
SUBSTRATE CLEANING DEVICE AND SUBSTRATE CLEANING METHOD
Publication number
20220020610
Publication date
Jan 20, 2022
EBARA CORPORATION
Haiyang Xu
B08 - CLEANING
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS AND METHOD FOR REMOVING SUBSTRATE FR...
Publication number
20210210374
Publication date
Jul 8, 2021
EBARA CORPORATION
Haiyang XU
B08 - CLEANING
Information
Patent Application
CLEANING DEVICE, SUBSTRATE PROCESSING APPARATUS, MAINTENANCE METHOD...
Publication number
20210175099
Publication date
Jun 10, 2021
EBARA CORPORATION
Hidetatsu Isokawa
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING DEVICE
Publication number
20200388510
Publication date
Dec 10, 2020
Koji MAEDA
B24 - GRINDING POLISHING
Information
Patent Application
SUBSTRATE CLEANING DEVICE AND SUBSTRATE CLEANING METHOD
Publication number
20200013640
Publication date
Jan 9, 2020
EBARA CORPORATION
Haiyang Xu
B08 - CLEANING
Information
Patent Application
TEACHING APPARATUS AND TEACHING METHOD FOR SUBSTRATE TRANSFER SYSTEM
Publication number
20190378740
Publication date
Dec 12, 2019
EBARA CORPORATION
Hidetatsu Isokawa
B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information
Patent Application
SUBSTRATE TRANSPORT SYSTEM, SUBSTRATE PROCESSING APPARATUS, HAND PO...
Publication number
20190164796
Publication date
May 30, 2019
EBARA CORPORATION
Kuniaki YAMAGUCHI
B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS AND METHOD FOR REMOVING SUBSTRATE FR...
Publication number
20190057894
Publication date
Feb 21, 2019
EBARA CORPORATION
Haiyang XU
B24 - GRINDING POLISHING
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS
Publication number
20180001440
Publication date
Jan 4, 2018
EBARA CORPORATION
Hiroshi AONO
B08 - CLEANING
Information
Patent Application
CLEANING APPARATUS AND SUBSTRATE PROCESSING APPARATUS
Publication number
20170372893
Publication date
Dec 28, 2017
EBARA CORPORATION
Koji Maeda
H01 - BASIC ELECTRIC ELEMENTS