Mitsuhiko Shirakashi

Person

Kanagawa, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate processing apparatus
- Patent number 9,287,158
- Issue date Mar 15, 2016
- Ebara Corporation
- Tamami Takahashi
- B24 - GRINDING POLISHING
Information Patent Grant
Method for regenerating ion exchanger
- Patent number 8,133,380
- Issue date Mar 13, 2012
- Ebara Corporation
- Takayuki Saito
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
Device for polishing peripheral edge of semiconductor wafer
- Patent number 8,029,333
- Issue date Oct 4, 2011
- Ebara Corporation
- Tamami Takahashi
- B24 - GRINDING POLISHING
Information Patent Grant
Electrolytic processing apparatus and method
- Patent number 7,655,118
- Issue date Feb 2, 2010
- Ebara Corporation
- Mitsuhiko Shirakashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electrolytic processing apparatus and electrolytic processing method
- Patent number 7,638,030
- Issue date Dec 29, 2009
- Ebara Corporation
- Osamu Nabeya
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Grant
Electrolytic processing apparatus and substrate processing apparatu...
- Patent number 7,569,135
- Issue date Aug 4, 2009
- Ebara Corporation
- Mitsuhiko Shirakashi
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Method and device for regenerating ion exchanger, and electrolytic...
- Patent number 7,427,345
- Issue date Sep 23, 2008
- Ebara Corporation
- Takayuki Saito
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Grant
Electrochemical machining method and apparatus
- Patent number 7,255,778
- Issue date Aug 14, 2007
- Ebara Corporation
- Yuzo Mori
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Substrate processing apparatus and method
- Patent number 7,208,076
- Issue date Apr 24, 2007
- Ebara Corporation
- Itsuki Kobata
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Polishing apparatus and method
- Patent number 7,108,589
- Issue date Sep 19, 2006
- Ebara Corporation
- Norio Kimura
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing method and apparatus
- Patent number 7,101,259
- Issue date Sep 5, 2006
- Ebara Corporation
- Norio Kimura
- B24 - GRINDING POLISHING
Information Patent Grant
Electrolytic processing device and substrate processing apparatus
- Patent number 7,101,465
- Issue date Sep 5, 2006
- Ebara Corporation
- Itsuki Kobata
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Polishing apparatus and method
- Patent number 6,935,932
- Issue date Aug 30, 2005
- Ebara Corporation
- Norio Kimura
- B24 - GRINDING POLISHING
Information Patent Grant
Substrate processing apparatus
- Patent number 6,932,884
- Issue date Aug 23, 2005
- Ebara Corporation
- Takayuki Saito
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electrolytic machining method and apparatus
- Patent number 6,875,335
- Issue date Apr 5, 2005
- Ebara Corporation
- Yuzo Mori
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Electrochemical machining method and apparatus
- Patent number 6,743,349
- Issue date Jun 1, 2004
- Ebara Corporation
- Yuzo Mori
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Polishing apparatus and method
- Patent number 6,722,964
- Issue date Apr 20, 2004
- Ebara Corporation
- Norio Kimura
- B24 - GRINDING POLISHING
Information Patent Grant
Cleaning method and cleaner
- Patent number 6,679,950
- Issue date Jan 20, 2004
- Ebara Corporation
- Hiroshi Tomita
- B08 - CLEANING
Information Patent Grant
Polishing method and apparatus
- Patent number 6,667,238
- Issue date Dec 23, 2003
- Ebara Corporation
- Norio Kimura
- B24 - GRINDING POLISHING
Information Patent Grant
Electrolytic machining method and apparatus
- Patent number 6,602,396
- Issue date Aug 5, 2003
- Ebara Corporation
- Yuzo Mori
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Apparatus and method for cleaning semiconductor substrate
- Patent number 6,543,080
- Issue date Apr 8, 2003
- Ebara Corporation
- Hiroshi Tomita
- B08 - CLEANING
Information Patent Grant
Apparatus for cleaning a substrate such as a semiconductor wafer
- Patent number 6,494,220
- Issue date Dec 17, 2002
- Ebara Corporation
- Naoki Matsuda
- B08 - CLEANING
Information Patent Grant
Electrolytic machining method and apparatus
- Patent number 6,368,493
- Issue date Apr 9, 2002
- Ebara Corporation
- Yuzo Mori
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Cleaning apparatus
- Patent number 6,308,361
- Issue date Oct 30, 2001
- Ebara Corporation
- Naoki Matsuda
- B08 - CLEANING
Information Patent Grant
Apparatus for cleaning substrate
- Patent number 6,248,009
- Issue date Jun 19, 2001
- Ebara Corporation
- Kenya Ito
- B08 - CLEANING

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20160172221
- Publication date Jun 16, 2016
- EBARA CORPORATION
- Tamami TAKAHASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DEVICE FOR AND METHOD OF POLISHING PERIPHERAL EDGE OF SEMICONDUCTOR...
- Publication number 20090093192
- Publication date Apr 9, 2009
- EBARA CORPORATION
- Tamami Takahashi
- B24 - GRINDING POLISHING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20090017733
- Publication date Jan 15, 2009
- EBARA CORPORATION
- Tamami Takahashi
- B24 - GRINDING POLISHING
Information Patent Application
Substrate Processing Apparatus
- Publication number 20080200100
- Publication date Aug 21, 2008
- EBARA CORPORATION
- Tamami Takahashi
- B24 - GRINDING POLISHING
Information Patent Application
Substrate processing apparatus and method
- Publication number 20070187259
- Publication date Aug 16, 2007
- Itsuki Kobata
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
Electrolytic processing apparatus and substrate processing apparatu...
- Publication number 20070181432
- Publication date Aug 9, 2007
- Mitsuhiko Shirakashi
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
Substrate processing apparatus and substrate processing method
- Publication number 20060234508
- Publication date Oct 19, 2006
- Mitsuhiko Shirakashi
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
Electrochemical machining device and electrochemical machining method
- Publication number 20060144711
- Publication date Jul 6, 2006
- Itsuki Kobata
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
Polishing apparatus and method
- Publication number 20050260933
- Publication date Nov 24, 2005
- Norio Kimura
- B24 - GRINDING POLISHING
Information Patent Application
Substrate processing apparatus
- Publication number 20050242064
- Publication date Nov 3, 2005
- Takayuki Saito
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Electrolytic processing apparatus and method
- Publication number 20050121328
- Publication date Jun 9, 2005
- Mitsuhiko Shirakashi
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
Electrolytic processing apparatus and method
- Publication number 20050115838
- Publication date Jun 2, 2005
- Yuzo Mori
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
Electrolytic processing apparatus and method
- Publication number 20050051432
- Publication date Mar 10, 2005
- Mitsuhiko Shirakashi
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
Electrolytic processing apparatus and method
- Publication number 20040256237
- Publication date Dec 23, 2004
- Itsuki Kobata
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
Substrate processing appartus and method
- Publication number 20040231989
- Publication date Nov 25, 2004
- Itsuki Kobata
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
Electrolytic processing apparatus and substrate processing apparatu...
- Publication number 20040206634
- Publication date Oct 21, 2004
- Mitsuhiko Shirakashi
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
Electrochemical machining method and apparatus
- Publication number 20040195109
- Publication date Oct 7, 2004
- Yuzo Mori
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
Polishing apparatus and method
- Publication number 20040166783
- Publication date Aug 26, 2004
- Norio Kimura
- B24 - GRINDING POLISHING
Information Patent Application
Electrolytic processing apparatus and electrolytic processing method
- Publication number 20040129569
- Publication date Jul 8, 2004
- Osamu Nabeya
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
Method and device for regenerating ion exchanger, and electrolytic...
- Publication number 20040112761
- Publication date Jun 17, 2004
- Takayuki Saito
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
Polishing method and apparatus
- Publication number 20040087258
- Publication date May 6, 2004
- Norio Kimura
- B24 - GRINDING POLISHING
Information Patent Application
Electrolytic machining method and apparatus
- Publication number 20030230493
- Publication date Dec 18, 2003
- Yuzo Mori
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
Electrolytic processing device and substrate processing apparatus
- Publication number 20030136668
- Publication date Jul 24, 2003
- Itsuki Kobata
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
Electrolytic processing device and substrate processing apparatus
- Publication number 20030132103
- Publication date Jul 17, 2003
- Itsuki Kobata
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
Substrate processing apparatus
- Publication number 20030041968
- Publication date Mar 6, 2003
- Takayuki Saito
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Electrolytic machining method and apparatus
- Publication number 20020033343
- Publication date Mar 21, 2002
- Yuzo Mori
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
Electrochemical machining method and apparatus
- Publication number 20020020630
- Publication date Feb 21, 2002
- Yuzo Mori
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
Cleaning method and cleaner
- Publication number 20020005214
- Publication date Jan 17, 2002
- Hiroshi Tomita
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
Polishing apparatus and method
- Publication number 20010029150
- Publication date Oct 11, 2001
- Norio Kimura
- B24 - GRINDING POLISHING

Mitsuhiko Shirakashi

Person

Patents Grantslast 30 patents

Substrate processing apparatus

Method for regenerating ion exchanger

Device for polishing peripheral edge of semiconductor wafer

Electrolytic processing apparatus and method

Electrolytic processing apparatus and electrolytic processing method

Electrolytic processing apparatus and substrate processing apparatu...

Method and device for regenerating ion exchanger, and electrolytic...

Electrochemical machining method and apparatus

Substrate processing apparatus and method

Polishing apparatus and method

Polishing method and apparatus

Electrolytic processing device and substrate processing apparatus

Polishing apparatus and method

Substrate processing apparatus

Electrolytic machining method and apparatus

Electrochemical machining method and apparatus

Polishing apparatus and method

Cleaning method and cleaner

Polishing method and apparatus

Electrolytic machining method and apparatus

Apparatus and method for cleaning semiconductor substrate

Apparatus for cleaning a substrate such as a semiconductor wafer

Electrolytic machining method and apparatus

Cleaning apparatus

Apparatus for cleaning substrate

Patents Applicationslast 30 patents

SUBSTRATE PROCESSING APPARATUS

DEVICE FOR AND METHOD OF POLISHING PERIPHERAL EDGE OF SEMICONDUCTOR...

SUBSTRATE PROCESSING APPARATUS

Substrate Processing Apparatus

Substrate processing apparatus and method

Electrolytic processing apparatus and substrate processing apparatu...

Substrate processing apparatus and substrate processing method

Electrochemical machining device and electrochemical machining method

Polishing apparatus and method

Substrate processing apparatus

Electrolytic processing apparatus and method

Electrolytic processing apparatus and method

Electrolytic processing apparatus and method

Electrolytic processing apparatus and method

Substrate processing appartus and method

Electrolytic processing apparatus and substrate processing apparatu...

Electrochemical machining method and apparatus

Polishing apparatus and method

Electrolytic processing apparatus and electrolytic processing method

Method and device for regenerating ion exchanger, and electrolytic...

Polishing method and apparatus

Electrolytic machining method and apparatus

Electrolytic processing device and substrate processing apparatus

Electrolytic processing device and substrate processing apparatus

Substrate processing apparatus

Electrolytic machining method and apparatus

Electrochemical machining method and apparatus

Cleaning method and cleaner

Polishing apparatus and method