Mitsuhiro Endou

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Susono-shi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Dry cleaning method for plasma processing apparatus
- Patent number 8,133,325
- Issue date Mar 13, 2012
- Ulvac, Inc.
- Masahisa Ueda
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC

Patents Applicationslast 30 patents

Information Patent Application
ETCHING METHOD AND ETCHING APPARATUS
- Publication number 20100213170
- Publication date Aug 26, 2010
- ULVAC, Inc.
- Yutaka Kokaze
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA PROCESSING APPARATUS AND MANUFACTURING METHOD OF DEPOSITION-...
- Publication number 20100151150
- Publication date Jun 17, 2010
- ULVAC, Inc.
- Yutaka Kokaze
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DRY CLEANING METHOD FOR PLASMA PROCESSING APPARATUS
- Publication number 20100083981
- Publication date Apr 8, 2010
- ULVAC, Inc.
- Masahisa Ueda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS FOR MANUFACTURING DEVICE
- Publication number 20090275146
- Publication date Nov 5, 2009
- ULVAC, Inc.
- Katsuo TAKANO
- H01 - BASIC ELECTRIC ELEMENTS