Mitsuhiro Fujita

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Kyoto, JP

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Patents Grantslast 30 patents

Information Patent Grant
Method of and apparatus for cleaning substrate
- Patent number 6,151,744
- Issue date Nov 28, 2000
- Dainippon Screen Mfg. Co., Ltd.
- Masami Ohtani
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate spin treating apparatus
- Patent number 5,846,327
- Issue date Dec 8, 1998
- Dainippon Screen Mfg. Co. Ltd.
- Takanori Kawamoto
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Apparatus for cleaning substrates and methods for attaching/detachi...
- Patent number 5,647,083
- Issue date Jul 15, 1997
- Dainippon Screen Mfg. Co., Ltd.
- Kenji Sugimoto
- B08 - CLEANING
Information Patent Grant
Apparatus for delivering a silica film forming solution
- Patent number 5,599,394
- Issue date Feb 4, 1997
- Dainippon Screen Mfg., Co., Ltd.
- Manabu Yabe
- F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
Information Patent Grant
Apparatus for applying liquid agent on surface of rotating substrate
- Patent number 5,180,431
- Issue date Jan 19, 1993
- Dainippon Screen Mfg. Co., Ltd.
- Kenji Sugimoto
- H01 - BASIC ELECTRIC ELEMENTS