Mitsuhiro HIRANO

Person

Toyama-shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate processing apparatus, method of manufacturing semiconduct...
- Patent number 10,604,839
- Issue date Mar 31, 2020
- Kokusai Electric Corporation
- Tetsuaki Inada
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus and manufacturing method for a semic...
- Patent number 9,111,972
- Issue date Aug 18, 2015
- Hitachi Kokusai Electric Inc.
- Mitsunori Takeshita
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus and maintenance method therefor
- Patent number 6,332,898
- Issue date Dec 25, 2001
- Kokusai Electric Co., Ltd.
- Kouji Tometsuka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus with local exhaust for removing cont...
- Patent number 6,264,706
- Issue date Jul 24, 2001
- Kokusai Electric Co., Ltd.
- Mitsuhiro Hirano
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus and maintenance method therefor
- Patent number 6,143,040
- Issue date Nov 7, 2000
- Kokusai Electric Co., Ltd.
- Kouji Tometsuka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Semiconductor manufacturing equipment and method for carrying wafer...
- Patent number 5,810,538
- Issue date Sep 22, 1998
- Kokusai Electric Co., Ltd.
- Makoto Ozawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for supplying and discharging gas to and from semiconductor...
- Patent number 5,277,215
- Issue date Jan 11, 1994
- Kokusai Electric Co., Ltd.
- Hidehiro Yanagawa
- C30 - CRYSTAL GROWTH

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...
- Publication number 20160053373
- Publication date Feb 25, 2016
- Hitachi Kokusai Electric Inc.
- Tetsuaki INADA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Substrate Processing Apparatus and Manufacturing Method for a Semic...
- Publication number 20080236488
- Publication date Oct 2, 2008
- Mitsunori Takeshita
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20020104206
- Publication date Aug 8, 2002
- MITSUHIRO HIRANO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Mitsuhiro HIRANO

Person

Patents Grantslast 30 patents

Substrate processing apparatus, method of manufacturing semiconduct...

Substrate processing apparatus and manufacturing method for a semic...

Substrate processing apparatus and maintenance method therefor

Substrate processing apparatus with local exhaust for removing cont...

Substrate processing apparatus and maintenance method therefor

Semiconductor manufacturing equipment and method for carrying wafer...

Method for supplying and discharging gas to and from semiconductor...

Patents Applicationslast 30 patents

SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...

Substrate Processing Apparatus and Manufacturing Method for a Semic...

SUBSTRATE PROCESSING APPARATUS