Mitsuhiro Iwano

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Kurokawa-gun, Miyagi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Etching method and plasma processing apparatus
- Patent number 12,014,930
- Issue date Jun 18, 2024
- Tokyo Electron Limited
- Mitsuhiro Iwano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of etching and plasma processing apparatus
- Patent number 11,710,643
- Issue date Jul 25, 2023
- Tokyo Electron Limited
- Mitsuhiro Iwano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Cleaning method and plasma processing apparatus
- Patent number 10,734,205
- Issue date Aug 4, 2020
- Tokyo Electron Limited
- Mitsuhiro Iwano
- B08 - CLEANING
Information Patent Grant
Etching method
- Patent number 10,529,583
- Issue date Jan 7, 2020
- Tokyo Electron Limited
- Mitsuhiro Iwano
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
PLASMA PROCESSING APPARATUS
- Publication number 20240290625
- Publication date Aug 29, 2024
- TOKYO ELECTRON LIMITED
- Mitsuhiro Iwano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ETCHING METHOD AND PLASMA PROCESSING APPARATUS
- Publication number 20210366718
- Publication date Nov 25, 2021
- TOKYO ELECTRON LIMITED
- Mitsuhiro Iwano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF ETCHING AND PLASMA PROCESSING APPARATUS
- Publication number 20210335623
- Publication date Oct 28, 2021
- TOKYO ELECTRON LIMITED
- Mitsuhiro Iwano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CLEANING METHOD AND PLASMA PROCESSING APPARATUS
- Publication number 20200135436
- Publication date Apr 30, 2020
- TOKYO ELECTRON LIMITED
- Mitsuhiro IWANO
- B08 - CLEANING
Information Patent Application
ETCHING METHOD
- Publication number 20190139780
- Publication date May 9, 2019
- TOKYO ELECTRON LIMITED
- Mitsuhiro Iwano
- H01 - BASIC ELECTRIC ELEMENTS