Mitsuhiro Kamei

Person

Takahagi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Apparatus for visual inspection
- Patent number 7,821,644
- Issue date Oct 26, 2010
- Hitachi High-Technologies Corporation
- Mitsuhiro Kamei
- G01 - MEASURING TESTING
Information Patent Grant
Active-matrix liquid crystal display unit in which gate and/or data...
- Patent number 5,999,236
- Issue date Dec 7, 1999
- Hitachi, Ltd.
- Katsunori Nakajima
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Multi-chamber sputtering apparatus
- Patent number 5,783,055
- Issue date Jul 21, 1998
- Hitachi, Ltd.
- Mitsuhiro Kamei
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Sputtering apparatus, device for exchanging target and method for t...
- Patent number 5,429,729
- Issue date Jul 4, 1995
- Hitachi, Ltd.
- Mitsuhiro Kamei
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Control apparatus and method for a substrate tray on an in-line spu...
- Patent number 5,376,777
- Issue date Dec 27, 1994
- Hitachi, Ltd.
- Mitsuhiro Kamei
- G07 - CHECKING-DEVICES
Information Patent Grant
Film forming system using high frequency power and power supply uni...
- Patent number 5,116,482
- Issue date May 26, 1992
- Hitachi, Ltd.
- Eiji Setoyama
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Sputtering apparatus for forming thin films
- Patent number 5,085,755
- Issue date Feb 4, 1992
- Hitachi, Ltd.
- Eiji Setoyama
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Thin film deposition system
- Patent number 4,986,890
- Issue date Jan 22, 1991
- Hitachi, Ltd.
- Eiji Setoyama
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Sputtering apparatus for production of thin films of magnetic mater...
- Patent number 4,911,815
- Issue date Mar 27, 1990
- Hitachi, Ltd.
- Mitsuhiro Kamei
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Magnetron sputter apparatus and method for forming films by using t...
- Patent number 4,865,709
- Issue date Sep 12, 1989
- Hitachi, Ltd.
- Yukio Nakagawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
APPARATUS FOR VISUAL INSPECTION
- Publication number 20110019200
- Publication date Jan 27, 2011
- Hitachi High-Technologies Corporation
- Mitsuhiro Kamei
- G01 - MEASURING TESTING
Information Patent Application
Apparatus for visual inspection
- Publication number 20060092426
- Publication date May 4, 2006
- Hitachi High-Technologies Corporation
- Mitsuhiro Kamei
- G01 - MEASURING TESTING
Information Patent Application
Sputtering system, sputtering support system and sputtering control...
- Publication number 20020014402
- Publication date Feb 7, 2002
- Yoshihiko Nagamine
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Mitsuhiro Kamei

Person

Patents Grantslast 30 patents

Apparatus for visual inspection

Active-matrix liquid crystal display unit in which gate and/or data...

Multi-chamber sputtering apparatus

Sputtering apparatus, device for exchanging target and method for t...

Control apparatus and method for a substrate tray on an in-line spu...

Film forming system using high frequency power and power supply uni...

Sputtering apparatus for forming thin films

Thin film deposition system

Sputtering apparatus for production of thin films of magnetic mater...

Magnetron sputter apparatus and method for forming films by using t...

Patents Applicationslast 30 patents

APPARATUS FOR VISUAL INSPECTION

Apparatus for visual inspection

Sputtering system, sputtering support system and sputtering control...