Mitsuhiro Nambu

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Kumamoto-ken, JP

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Patents Grantslast 30 patents

Information Patent Grant
Method of forming coating film and apparatus therefor
- Patent number 6,063,190
- Issue date May 16, 2000
- Tokyo Electron Limited
- Keizo Hasebe
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Solvent and resist spin coating apparatus
- Patent number 5,942,035
- Issue date Aug 24, 1999
- Tokyo Electron Limited
- Keizo Hasebe
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method of forming coating film and apparatus therefor
- Patent number 5,658,615
- Issue date Aug 19, 1997
- Tokyo Electron Limited
- Keizo Hasebe
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY