Mitsuhiro Ogawa

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Patents Grantslast 30 patents

Information Patent Grant
Two-fluid cleaning jet nozzle and cleaning apparatus, and method ut...
- Patent number 5,918,817
- Issue date Jul 6, 1999
- Mitsubishi Denki Kabushiki Kaisha
- Itaru Kanno
- B08 - CLEANING
Information Patent Grant
Apparatus and method for cleaning semiconductor wafers
- Patent number 5,217,925
- Issue date Jun 8, 1993
- Taiyo Sanso Co., Ltd.
- Mitsuhiro Ogawa
- H01 - BASIC ELECTRIC ELEMENTS