Mitsuhiro Ohkuni

Person

Osaka, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Plasma etching apparatus and plasma etching process
- Patent number 7,268,083
- Issue date Sep 11, 2007
- Matsushita Electric Industrial Co., Ltd.
- Mitsuhiro Ohkuni
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus for plasma etching having rotating coil responsive to sli...
- Patent number 6,582,551
- Issue date Jun 24, 2003
- Matsushita Electric Industrial Co., Ltd.
- Mitsuhiro Ohkuni
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and method for plasma etching
- Patent number 6,409,877
- Issue date Jun 25, 2002
- Matsushita Electronics Corporation
- Mitsuhiro Ohkuni
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and method for plasma etching
- Patent number 6,355,183
- Issue date Mar 12, 2002
- Matsushita Electric Industrial Co., Ltd.
- Mitsuhiro Ohkuni
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for plasma etching
- Patent number 6,274,502
- Issue date Aug 14, 2001
- Matsushita Electronics Corporation
- Mitsuhiro Ohkuni
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Etching method and etching apparatus
- Patent number 6,210,593
- Issue date Apr 3, 2001
- Matsushita Electric Industrial Co., Ltd.
- Mitsuhiro Ohkuni
- G01 - MEASURING TESTING
Information Patent Grant
Pattern formation method
- Patent number 6,187,688
- Issue date Feb 13, 2001
- Matsushita Electric Industrial Co., Ltd.
- Mitsuhiro Ohkuni
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Plasma generating method and apparatus
- Patent number 5,424,905
- Issue date Jun 13, 1995
- Matsushita Electric Company, Ltd.
- Noboru Nomura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma generating apparatus
- Patent number 5,404,079
- Issue date Apr 4, 1995
- Matsushita Electric Industrial Co., Ltd.
- Mitsuhiro Ohkuni
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for generating highly dense uniform plasma in...
- Patent number 5,345,145
- Issue date Sep 6, 1994
- Matsushita Electric Industrial Co., Ltd.
- Kenji Harafuji
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for generating highly dense uniform plasma by...
- Patent number 5,332,880
- Issue date Jul 26, 1994
- Matsushita Electric Industrial Co., Ltd.
- Masafumi Kubota
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
Plasma ethching apparatus and plasma etching process
- Publication number 20070074815
- Publication date Apr 5, 2007
- Matsushita Electric Industrial Co., Ltd.
- Mitsuhiro Ohkuni
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Plasma etching apparatus and plasma etching process
- Publication number 20050199343
- Publication date Sep 15, 2005
- MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD.
- Mitsuhiro Ohkuni
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Apparatus and method for plasma etching
- Publication number 20020134509
- Publication date Sep 26, 2002
- Matsushita Electronics Corporation
- Mitsuhiro Ohkuni
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Apparatus and method for plasma etching
- Publication number 20020033231
- Publication date Mar 21, 2002
- Matsushita Electronics Corporation
- Mitsuhiro Ohkuni
- H01 - BASIC ELECTRIC ELEMENTS

Mitsuhiro Ohkuni

Person

Patents Grantslast 30 patents

Plasma etching apparatus and plasma etching process

Apparatus for plasma etching having rotating coil responsive to sli...

Apparatus and method for plasma etching

Apparatus and method for plasma etching

Method for plasma etching

Etching method and etching apparatus

Pattern formation method

Plasma generating method and apparatus

Plasma generating apparatus

Method and apparatus for generating highly dense uniform plasma in...

Method and apparatus for generating highly dense uniform plasma by...

Patents Applicationslast 30 patents

Plasma ethching apparatus and plasma etching process

Plasma etching apparatus and plasma etching process

Apparatus and method for plasma etching

Apparatus and method for plasma etching