Mitsuhiro Tanoue

Person

Kumamoto, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate carrying and processing apparatus
- Patent number 7,836,845
- Issue date Nov 23, 2010
- Tokyo Electron Limited
- Mitsuhiro Tanoue
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Coating and developing apparatus, and coating and developing method
- Patent number 7,661,894
- Issue date Feb 16, 2010
- Tokyo Electron Limited
- Nobuaki Matsuoka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Heat treatment unit and heat treatment method
- Patent number 6,815,647
- Issue date Nov 9, 2004
- Tokyo Electron Limited
- Mitsuhiro Tanoue
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Heat processing apparatus of substrate
- Patent number 6,551,448
- Issue date Apr 22, 2003
- Tokyo Electron Limited
- Yasuhiro Kuga
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Heat treatment unit and heat treatment method
- Patent number 6,534,750
- Issue date Mar 18, 2003
- Tokyo Electron Limited
- Mitsuhiro Tanoue
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Hot plate cooling method and heat processing apparatus
- Patent number 6,474,986
- Issue date Nov 5, 2002
- Tokyo Electron Limited
- Tetsuya Oda
- F27 - FURNACES KILNS OVENS RETORTS
Information Patent Grant
Hot plate cooling method and heat processing apparatus
- Patent number 6,450,805
- Issue date Sep 17, 2002
- Tokyo Electron Limited
- Tetsuya Oda
- F27 - FURNACES KILNS OVENS RETORTS
Information Patent Grant
Heating apparatus for heating an object to be processed
- Patent number 6,185,370
- Issue date Feb 6, 2001
- Tokyo Electron Limited
- Eiichi Sekimoto
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE CARRYING AND PROCESSING APPARATUS
- Publication number 20070245949
- Publication date Oct 25, 2007
- TOKYO ELECTRON LIMITED
- Mitsuhiro TANOUE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Coating and developing apparatus, and coating and developing method
- Publication number 20070089673
- Publication date Apr 26, 2007
- TOKYO ELECTRON LIMITED
- Nobuaki Matsuoka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Heat treatment unit and heat treatment method
- Publication number 20030121902
- Publication date Jul 3, 2003
- Mitsuhiro Tanoue
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Heat processing apparatus of substrate
- Publication number 20010053507
- Publication date Dec 20, 2001
- TOKYO ELECTRON LIMITED
- Yasuhiro Kuga
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Hot plate cooling method and heat processing apparatus
- Publication number 20010038988
- Publication date Nov 8, 2001
- TOKYO ELECTRON LIMITED
- Tetsuya Oda
- H01 - BASIC ELECTRIC ELEMENTS

Mitsuhiro Tanoue

Person

Patents Grantslast 30 patents

Substrate carrying and processing apparatus

Coating and developing apparatus, and coating and developing method

Heat treatment unit and heat treatment method

Heat processing apparatus of substrate

Heat treatment unit and heat treatment method

Hot plate cooling method and heat processing apparatus

Hot plate cooling method and heat processing apparatus

Heating apparatus for heating an object to be processed

Patents Applicationslast 30 patents

SUBSTRATE CARRYING AND PROCESSING APPARATUS

Coating and developing apparatus, and coating and developing method

Heat treatment unit and heat treatment method

Heat processing apparatus of substrate

Hot plate cooling method and heat processing apparatus